Microresonator-on-Membrane for Real-Time Mass Sensing in Liquid Phase
Microresonator-on-Membrane for Real-Time Mass Sensing in Liquid Phase
复制标题
用于液相实时质量传感的膜上微谐振器
作者：
M. Mahdavi;S. Pourkamali
膜上微谐振器（MRoM）在这篇文章中提出了一种新的方法来解决与液体介质接触的微尺度谐振器的性能恶化。MRoM由形成在隔离膜顶部上的矩形衬底上压电谐振器组成，其可以在其长度和宽度延伸（LE和WE）谐振模式下操作。在所提出的方案中，在测试下的溶液被添加到MRoM芯片背面的微腔中。以这种方式，谐振器与液体的接触表面被最小化，以减少由粘性阻尼引起的机械损失，从而导致更高的谐振器品质因数（Q）。同时，由膜引起的隔离消除了离子溶液对谐振器性能的电干扰。尽管实现了这样的优点，谐振器下面的膜引起进一步的锚定损耗，这降低了在空气中操作的MROM的Q。为了最小化这种损失，平面内的初级和次级圆形声反射器位于谐振器周围，从而导致更高的Q。因此，当在空气中操作时，具有二次反射器的MRoM表现出高达3500的Qs，用于分别在39和83MHz的LE和WE谐振模式下操作，示出了对由膜的存在引起的锚定损耗的充分抑制。此外，对于在WE模式下操作的MRoM，实现了高达410的最大液相Q。作为质量传感器，MRoM在相同模式下工作时表现出12 Hz.cm2ng的质量灵敏度。
Microresonator-on-membrane (MRoM) is presented in this article as a new approach to address the performance deterioration of microscale resonators in contact with a liquid media. An MRoM is composed of a rectangular piezoelectric-on-substrate resonator formed on top of an isolating membrane, which can operate in its length and width extensional (LE and WE) resonance modes. In the proposed scheme, the solution under a test is added into a microcavity on the back side of the MRoM chip. In this manner, the contact surface of the resonator to liquid is minimized to reduce mechanical losses caused by viscous damping, leading to a higher resonator quality factor ( Q). Simultaneously, isolation caused by the membrane eliminates electrical interference of ionic solutions on a resonator performance. Despite enabling such advantages, the membrane underneath the resonator causes further anchoring losses, which reduces the Qs of MRoMs operating in air. To minimize such losses, in-plane primary and secondary circular acoustic reflectors are located around the resonator leading to higher Qs. Consequently, the MRoMs with secondary reflectors exhibit the Qs as high as 3500 for operation at both LE and WE resonance modes of 39 and 83MHz, respectively, when operating in air, showing adequate suppression of anchoring loss caused by the presence of the membrane. Also, maximum liquid phase Q s up to 410 are achieved for the MRoMs, which operate in the WE mode. As mass sensors, the MRoMs demonstrate mass sensitivity of 12 Hz.cm2ng while operating at the same mode.
影响因子：
10.8
作者：
Lee, Jungchul;Shen, Wenjiang;Manalis, Scott R.
通讯作者：
Manalis, Scott R.
影响因子：
7.4
作者：
Lee, HJ;Li, Y;Corn, RM
通讯作者：
Corn, RM