Ultrahigh sensitivity stress sensing method near the exceptional point of parity-time symmetric systems

Ultrahigh sensitivity stress sensing method near the exceptional point of parity-time symmetric systems
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宇称时间对称系统特异点附近的超高灵敏度应力传感方法

DOI:
10.1088/1361-6463/ab761d
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发表时间:
2020-03
期刊:
Journal of Physics D: Applied Physics
影响因子:
--
通讯作者:
Liu Jun
Liu Jun
中科院分区:
其他
文献类型:
--
作者:
Xing Tong;Pan Ziwen;Tao Yu;Xing Guohui;Wang Rong;Liu Wenyao;Xing Enbo;Rong Jiamin;Tang Jun;Liu Jun

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在航空航天、工业自动化和生物医学等领域,对具有超灵敏度的超低应力传感器有着迫切的需求。本文从理论上提出了一种在宇称-时间对称系统的例外点(EP)附近实现微应力传感的新方法。在奇偶时间对称系统中,一个环形谐振器嵌入悬臂梁作为敏感元件,通过调整双环谐振器的间距和增益来确定EP。通过施加表面应力载荷,使用有限元模拟软件对悬臂梁的应力-变形敏感性进行表征,该应力-变形敏感性呈现悬臂梁的应力-变形敏感性的关系。通过在悬臂梁中引入孔,该结构的应力传感器的灵敏度比不带孔的悬臂梁结构提高约5倍。因此,最终选择了带孔悬臂梁结构。与单环结构相比,在0-1 nPa应力范围内,半径为30 µm时,该方法的灵敏度提高了8个数量级。采用闭环反馈系统使系统保持在异常点,减小读出误差。该方法为今后微应力传感器的设计奠定了基础,其主要优点是微应力传感器灵敏度高、体积小、抗电磁干扰、稳定性好,可以推广到更多的系统中。
Ultralow stress sensors with ultrahigh sensitivity have an urgent need for micro-pressure measurement in aerospace, industrial automation and biomedical inventions. In this paper, a new method of ultrahigh sensitivity micro stress sensing is proposed near the exceptional point (EP) of parity-time symmetric systems theoretically. The EP is determined via the adjustment of the distance and the gain of the double ring resonators in the parity-time symmetric system, in which one ring resonator is embedded on the cantilever beam served as the sensing element. The cantilevers are characterized using finite element simulation software for their stress-deformation sensitivity by applying surface stress loads, which present a relation for the stress-deformation sensitivity of the cantilever beam. By introducing the hole in the cantilever beam, the sensitivity of the stress sensor of the structure can be improved by about 5 times compared to the cantilever beam structure without the hole. Therefore, the cantilever beam with the hole is selected as the final structure. Furthermore, compared with the single ring structure, our method enhances the sensitivity of the structure to about 8 orders of magnitude at the stress range is 0–1 nPa and the radius is 30 µm. A closed-loop feedback system is used to keep the system at the exceptional point and to reduce the readout error. This method paves a way for future design of ultrahigh sensitivity micro stress sensor, and the main benefit of this method include ultrahigh sensitivity, small size, anti-electromagnetic interference and high stability, which can be extended to more systems.
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