Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry
Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry
复制标题
利用散斑干涉法进行超越透镜衍射极限的三维形状测量
DOI：
10.1080/09500340.2018.1470266
复制
发表时间：
2018
影响因子：
1.3
通讯作者：
Y. Arai
中科院分区：
文献类型：
--
作者：
Y. Arai
散斑干涉法是一种测量粗糙表面物体变形的方法。利用散斑干涉的基本特性，提出了一种超衍射极限的超微细结构三维面形测量方法。由于这种物体的形状的微分系数分布可以通过向被测物体施加已知的横向偏移而在散斑干涉测量法中检测，因此可以通过积分微分系数分布来重构形状。基于使用衍射光栅作为测量对象所获得的实验结果，证实了所提出的方法可以测量超过透镜的衍射极限的3D形状。
ABSTRACT Speckle interferometry is generally known as a method for measuring the deformation of an object with rough surfaces. In this paper, a three-dimensional (3D) shape measurement method is proposed for superfine structures beyond the diffraction limit using the basic property of speckle interferometry. Since the differential coefficient distribution of the shape of such an object can be detected in speckle interferometry by imparting a known lateral shift to the measured object, the shape can be reconstructed by integrating the differential coefficient distribution. Based on experimental results obtained using diffraction gratings as measured objects, it is confirmed that the proposed method can measure 3D shapes that are beyond the diffraction limit of the lens.
影响因子：
1.3
作者：
Arai, Yasuhiko
通讯作者：
Arai, Yasuhiko
基于空间条纹分析metgid的电散斑干涉测量面内位移
DOI：
--
发表时间：
2004
期刊：
Optical Engineering Vol.43, No.9
影响因子：
--
作者：
Y.Arai;S.Yokozeki
通讯作者：
S.Yokozeki