Spray coating fabrication: thin film formation on non-planar surface
Spray coating fabrication: thin film formation on non-planar surface
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喷涂制造：在非平面表面形成薄膜
DOI：
10.1109/sensor.2003.1215601
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
R. Maeda
中科院分区：
文献类型：
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作者：
M. Ichiki;L. Zhang;Z. Yang;T. Ikehara;R. Maeda
本文提出了一种采用喷涂方法的MEMS智能材料三维微加工与集成技术。对于非平面表面的附加沉积，喷涂是最有效的。在平坦表面和凹凸表面均可形成PZT薄膜，厚度约为1/spl mu/m。通过适当的热处理，形成了钙钛矿结构，并获得了铁电P-E磁滞回线。这篇论文是我们课题组和其他研究人员关于使用喷涂方法沉积MEMS智能材料的第一篇报告。喷涂是一种有效的三维涂层方法，可用于沉积传感器和执行器的压电、热释电、磁性等器件。基材表面与喷射液之间的亲疏水性是改善薄膜生长条件的最重要的工艺因素。
This paper presents a three-dimensional microfabrication and integration technology for MEMS smart materials that utilizes a spray coating method. Spray coating is shown to be most effective for additional deposition on non-planar surfaces. PZT films were formed both on flat and uneven surfaces at a thickness of about 1/spl mu/m. Perovskite structures were formed with suitable heat treatment and ferroelectric P-E hysteresis loop was also obtained. This paper is the first report from our group and other researchers on the deposition of smart materials for MEMS using a spray coating method. Spray coating has been proposed as an effective three-dimensional coating method which can be used to deposit piezoelectrics, pyroelectrics, magnetics, etc. for sensors and actuators. The hydrophilic and hydrophobic properties between the substrate surface and ejected liquid are most essential process factors in the spray coating method for improving the film growth conditions.
使用 Ir 前驱体通过金属有机化学气相沉积法制备 Ir 基电极
DOI：
--
发表时间：
2006
期刊：
Jpn. J. Appl. Phys. 45
影响因子：
--
作者：
Eiji Higurashi;Yuichiro Tokuda;Masatake Akaike;and Tadatomo Suga;清水 勝;M.Shimizu;H.Fujisawa et al.;清水 勝;H.Fujisawa;H.Fujisawa
通讯作者：
H.Fujisawa