Microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
Microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
复制标题
微加工水浸式扫描镜，外形尺寸小，适用于手持式超声和光声显微镜
DOI：
--
复制
发表时间：
2015
期刊：
影响因子：
--
通讯作者：
J. Zou
中科院分区：
文献类型：
--
作者：
Song Xu;Chih;J. Zou
抽象。可以在水下可靠地操作的微扫描镜在超声和光声显微成像中都是有用的，其中期望对聚焦的高频超声波束进行快速扫描以用于逐像素数据采集。我们报道了一种新的微加工的小形状因子的水浸扫描镜的发展。它包括一个光学和声学反射镜板，这是由两个灵活的聚合物铰链和集成的电磁微驱动器驱动。在空气和水中分别以250 Hz和210 Hz的谐振频率实现±12.1 °的单轴扫描。通过优化设计和高精度光学三维打印强化制作，扫描镜模块整体尺寸小于7 mm×5 mm×7 mm。新型水浸式扫描镜的小外形、大扫描角度和高谐振频率使其适合构建紧凑型手持式成像探头，用于体内高速和宽场超声和光声显微镜。
Abstract. Microscanning mirrors that can operate reliably under water are useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. We report the development of a new microfabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate which is supported by two flexible polymer hinges and driven by an integrated electromagnetic microactuator. It can achieve 1-axis scanning of ±12.1 deg at a resonant frequency of 250 Hz in air and 210 Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical three-dimensional printing, the overall size of the scanning mirror module is less than 7 mm×5 mm×7 mm. The small form factor, large scanning angle, and high-resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in vivo high-speed and wide-field ultrasound and photoacoustic microscopy.
影响因子：
3.5
作者：
Song, Liang;Maslov, Konstantin;Wang, Lihong V.
通讯作者：
Wang, Lihong V.