Evaluation of Wear Resistance of Sputtered Amorphous Sicn Film and Measurement of Delamination Strength of Film by Micro Edge-Indent Method
Evaluation of Wear Resistance of Sputtered Amorphous Sicn Film and Measurement of Delamination Strength of Film by Micro Edge-Indent Method
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溅射非晶硅薄膜耐磨性评价及微边压痕法测量薄膜分层强度
DOI：
10.1007/978-1-4020-6239-1_27
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
K. Nakasa
中科院分区：
文献类型：
--
作者：
Masahiko Kato;J. Zheng;Seiji Takezoe;K. Nakasa
采用氩气和氮气的混合气体，在射频磁控溅射装置中，以SiC为靶材，在钛和工具钢基体上沉积SiC和SiCN薄膜。提出了一种新的评价薄膜剥离强度的微磨边法，并考察了剥离能与薄膜磨损强度之间的关系。结果表明，微边缘拉伸试验是评价薄膜分层能的有效方法，Ti基SiC薄膜的分层能大于工具钢基SiC薄膜。SiC和SiCN薄膜的最大剥离能均出现在衬底不加热、氮气流量约为1.0cm3/min时。SiC薄膜的磨损剥离循环次数随衬底加热温度的升高而减小，SiCN薄膜的磨损剥离循环次数随氮气流量的增加而减小。膜层的剥离周期与磨损前的剥离能基本一致，但也受膜层的摩擦系数和硬度的影响。
SiC and SiCN films were deposited on titanium and tool steel substrates in an RF magnetron sputtering apparatus with a SiC target using a mixture of argon and nitrogen gas. A micro edge-indent method was newly proposed to evaluate delamination strength of the thin films, and the relation between the delamination energy and wear strength of the films was examined. The results show that the micro edge-indent test is effective to evaluate the delamination energy of thin films, and the delamination energy of SiC film is larger for Ti substrate than tool steel substrate. The maximum delamination energy of the SiC and SiCN films are obtained when the substrate is not heated and the nitrogen gas flow rate is about 1.0 cm 3/min. The wear delamination cycles of SiC film decreases with increasing substrate heating temperature, and that of SiCN film decreases with increasing nitrogen gas flow rate. The delamination cycles of the films almost correspond with the delamination energy before wear tests, but they are also affected by friction coefficient and hardness of films.
高频磁控管同时溅射法形成SiC-Ti和SiC-Al薄膜的摩擦磨损特性
DOI：
--
发表时间：
2005
期刊：
日本機械学会論文集(A編) 71・702
影响因子：
--
作者：
加藤昌彦;中佐啓治郎;鄭 錦華;廣田悟史
通讯作者：
廣田悟史