Compact optomechanical inertial sensors with fused silicia and si-based resonators
Compact optomechanical inertial sensors with fused silicia and si-based resonators
复制标题
带有熔融二氧化硅和硅基谐振器的紧凑型光机械惯性传感器
DOI：
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
F. Guzmán
中科院分区：
文献类型：
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作者：
Andrea Nelson;F. Guzmán
惯性传感器用于各种应用，包括惯性导航和精密测量。谐振器中测试质量位移的光学测量允许创建紧凑的加速度计系统。熔融石英谐振器由于其在室温下的高机械品质因数Q而具有出色的加速度灵敏度，但在较低温度下会发生显著变化。然而，晶体硅的Q因子在低温下仍然很高。我们使用在室温下工作的紧凑型熔融石英谐振器，旨在从Si晶片制造紧凑型可比机械谐振器。我们将报告这些谐振器的制造进展和衰荡和灵敏度测量的结果。
Inertial sensors are used in a variety of applications including inertial navigation and precision measurements. Optical measurement of test mass displacement in a resonator allows for the creation of compact accelerometer systems. Fused silica resonators allow for excellent acceleration sensitivities due to their high mechanical quality factor, Q, at room temperature, but this changes significantly at lower temperatures. The Q factor of crystalline silicon, however, remains high at low temperatures. We work with compact fused silica resonators that operate at room temperature and aim to fabricate compact comparable mechanical resonators from Si wafers. We will report on the fabrication progress of these resonators and results from ringdown and sensitivity measurements.
用于低温的硅基光机械惯性传感器的微制造
DOI：
10.1117/12.2594388
发表时间：
2021
期刊：
Applied Optical Metrology IV
影响因子：
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作者：
Nelson, Andrea;Guzman, Felipe
通讯作者：
Guzman, Felipe