Sensing properties of infrared nanostructured plasmonic crystals fabricated by electron beam lithography and argon ion milling

Sensing properties of infrared nanostructured plasmonic crystals fabricated by electron beam lithography and argon ion milling
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电子束光刻和氩离子铣削制备的红外纳米结构等离子体晶体的传感特性

DOI:
10.1116/1.4767274
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发表时间:
2012-11
期刊:
J. Vac. Sci. Technol. B
影响因子:
--
通讯作者:
Baogang Quan
Baogang Quan
中科院分区:
其他
文献类型:
--
作者:
Baogang Quan

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本文报道了X型纳米等离子体晶体的制备、理论模拟、光学特性及其在生物传感器中的应用。采用电子束光刻和氩离子束铣削相结合的方法制备了特征线宽为30 nm、不同夹角的X型光子晶体。采用实验测量和时域有限差分模拟方法研究了两种不同偏振态入射光下光子晶体的透射特性。随着X型光子晶体对称性的降低,光子晶体的透射光谱在近红外波段出现了一个新的峰值,峰值位于近900 nm处,光学实验结果与模拟结果一致。等离子体晶体为基础的生物传感器,然后通过自组装的十八烷基乙二醇的PC,然后通过生物素化和固定化的链霉亲和素的生物传感器。在生物传感器应用中,具有30°交叉角的基于PC的生物传感器的传感性能上级具有更大交叉角的基于PC的生物传感器。强有力的制造技术和策略,以提高灵敏度的生物传感器赋予X形的PC与其他候选人有很大的竞争优势。
In this paper, the authors report on the fabrication, theory simulation, and optical characterization of X-shaped nanoscale plasmonic crystals (PCs) and their application in biosensors. X-shaped PCs with 30 nm feature line-widths and different intersection angles were fabricated by a combination of electron beam lithography and argon ion beam milling techniques. Both experimental measurement and finite-difference time-domain simulations were employed to study the transmission properties of PCs under two different incident light polarizations. With the reduction of the symmetry of the X-shaped PCs, the transmission spectra of PCs show a new peak at ∼900 nm in the near-infrared region, and the optical experimental results were consistent with the simulated results. Plasmonic crystal-based biosensors were then prepared by self-assembly of octadecanethiol to the PCs followed by biotinylation and immobilization of streptavidin to the biosensor. The sensing properties of the PC-based biosensors with a 30° intersection angle, which is enhanced by a localized surface plasmon resonance with the asymmetry of the PC, are superior to those with a larger intersection angle in biosensor application. The robust fabrication technique and the strategy for enhancing the sensitivity of the biosensor endow X-shaped PCs with a great competitive advantage over other candidates.
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