Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers.
Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers.
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DOI：
10.1038/ncomms12487
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发表时间：
2016-09-26
影响因子：
16.6
通讯作者：
Fantner, Georg E.
中科院分区：
文献类型：
--
作者：
Dukic, Maja;Winhold, Marcel;Schwalb, Christian H.;Adams, Jonathan D.;Stavrov, Vladimir;Huth, Michael;Fantner, Georg E.
通过减小尺寸，基于MEMS的机械传感器的灵敏度和检测速度大幅提高。对高速纳米表征和生物传感性能的需求推动了它们在各种研究领域的亚微米小型化。然而，现有的悬臂梁运动的检测方法不容易按比例缩小，从而阻碍了灵敏度和检测速度的进一步提高。在这里，我们报告了一个纳米机械传感器读出的基础上，通过纳米颗粒金属的电子共隧穿。传感器的横向尺寸可以低至数十nm，允许读出纳米级的杠杆，而不受其尺寸，几何形状或材料的限制。通过改变颗粒间隧道耦合强度，传感器的电导率可以调节多达四个数量级，以优化其性能。我们表明，纳米级印刷传感器在500 nm宽的杠杆上是功能性的，它们的灵敏度甚至适合于要求苛刻的应用，如原子力显微镜。 减小基于MEMS的传感器的尺寸增加了诸如原子力显微镜等技术的灵敏度和检测速度。在这里，作者展示了一种纳米机械读出方法，该方法可以通过使用通过纳米颗粒金属的电子共隧穿来容易地按比例缩小尺寸。
The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically through size reduction. The need for such increased performance for high-speed nanocharacterization and bio-sensing, drives their sub-micrometre miniaturization in a variety of research fields. However, existing detection methods of the cantilever motion do not scale down easily, prohibiting further increase in the sensitivity and detection speed. Here we report a nanomechanical sensor readout based on electron co-tunnelling through a nanogranular metal. The sensors can be deposited with lateral dimensions down to tens of nm, allowing the readout of nanoscale cantilevers without constraints on their size, geometry or material. By modifying the inter-granular tunnel-coupling strength, the sensors' conductivity can be tuned by up to four orders of magnitude, to optimize their performance. We show that the nanoscale printed sensors are functional on 500 nm wide cantilevers and that their sensitivity is suited even for demanding applications such as atomic force microscopy. Reducing the size of cantilever-based sensors increases the sensitivity and detection speed of techniques such as atomic force microscopy. Here, the authors demonstrate a nanomechanical readout method that can be easily scaled down in size by using electron co-tunnelling through a nanogranular metal.
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DOI：
10.1007/s00339-014-8631-9
发表时间：
2014-12-01
影响因子：
2.7
作者：
Huth, Michael;Kolb, Florian;Plank, Harald
通讯作者：
Plank, Harald
影响因子：
38.3
作者：
Li, Mo;Tang, H. X.;Roukes, M. L.
通讯作者：
Roukes, M. L.
影响因子：
3.5
作者：
Antognozzi, M.;Ulcinas, A.;Miles, M. J.
通讯作者：
Miles, M. J.
影响因子：
10.8
作者：
Feng, X. L.;He, Rongrui;Roukes, M. L.
通讯作者：
Roukes, M. L.
影响因子：
38.3
作者：
Huber, F.;Lang, H. P.;Gerber, Ch
通讯作者：
Gerber, Ch