Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin
Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin
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几种光固化树脂的UV-NIL应用可行性研究
DOI：
10.2494/photopolymer.18.531
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发表时间：
2005
影响因子：
0.8
通讯作者：
Tamano Hirasawa
中科院分区：
文献类型：
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作者：
N. Sakai;J. Taniguchi;K. Kawaguchi;M. Ohtaguchi;Tamano Hirasawa
我们制备了五种光固化树脂，并对它们的热性能、机械性能和压印工艺的应用可用性进行了评估实验。研究了TG法、TM-DSC法和激光干涉法的热性能测量。从这些测量中发现，可以测量树脂的热稳定温度、玻璃化转变温度和线性膨胀系数。此外，还研究了使用纳米压痕测量机械性能。在该方法中，可以测量基板上树脂薄膜的杨氏模量。关于压印工艺的应用可用性，我们通过测量两种树脂的粘合力来研究脱模处理的效果及其耐久性。据观察，脱模处理效果的耐久性差异取决于树脂类型。
We prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical properties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were studied. From these measurements, it was found that the measurements of the thermally stable temperature, glass-transition temperature, and linear expansion coefficient of the resins were possible. Also, measurements of mechanical properties using the nano indentation were studied. In this method, the measurements of Young's modulus of the thin resin film on the substrate were possible. With respect to application availability for the imprint process, we investigated effects of the mold release treatment and their durability for two kinds of resins by measuring their adhesive force. It was observed that the difference in durability of mold release treatment effects depends on the resin type.
利用基板电压变化的3D压印技术
DOI：
--
发表时间：
2004
期刊：
Applied Surface Science 238
影响因子：
--
作者：
Y.Nakayama;L.Pan;O.Suekane;T.Nosaka;T.Nosaka Toshikazu;Jun Taniguchi et al.
通讯作者：
Jun Taniguchi et al.