GaN-based radial heterostructure nanowires grown by MBE and ALD

GaN-based radial heterostructure nanowires grown by MBE and ALD
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MBE 和 ALD 生长的 GaN 基径向异质结构纳米线

DOI:
10.1088/1742-6596/471/1/012039
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发表时间:
2013
期刊:
Conference Series
影响因子:
--
通讯作者:
Lari L
Lari L
中科院分区:
--
文献类型:
--
作者:
Lari L

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采用分子束外延(MBE)和原子层沉积(ALD)相结合的方法制备了GaN基核/壳NW结构。采用ALD技术在MBE生长的GaN纳米线上存款HfO 2壳层.电子透明的样品制备通过聚焦离子束方法和其特征在于使用国家的最先进的分析透射和扫描透射电子显微镜。多晶涂层被发现是均匀的沿着整个长度的纳米线。光致发光和拉曼光谱分析证实了HfO 2 ALD涂层沉积在纳米线上时没有增加任何结构缺陷。
A combination of molecular beam epitaxy (MBE) and atomic layer deposition (ALD) was adopted to fabricate GaN-based core/shell NW structures. ALD was used to deposit a HfO 2 shell of onto the MBE grown GaN NWs. Electron transparent samples were prepared by focussed ion beam methods and characterized using state-of-the-art analytical transmission and scanning transmission electron microscopy. The polycrystalline coating was found to be uniform along the whole length of the NWs. Photoluminescence and Raman spectroscopy analysis confirms that the HfO 2 ALD coating does not add any structural defect when deposited on the NWs.
通过液体注射 ALD 技术沉积 HfO2、Gd2O3 和 PrOx†
DOI: 10.1002/cvde.200406348
发表时间: 2005
影响因子: --
作者:
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DOI: 10.1002/pssa.200780132
发表时间: 2008
期刊: physica status solidi (a)
影响因子: --
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发表时间: 2011-07-01
影响因子: 4.9
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