Towards integrated position sensors with nanometer precision
Towards integrated position sensors with nanometer precision
复制标题
迈向纳米级精度的集成位置传感器
DOI：
10.1117/12.2644959
复制
发表时间：
2023
期刊：
影响因子：
--
通讯作者：
Schulz S
中科院分区：
文献类型：
--
作者：
Schulz S
精确测量两个元件（例如掩模和衬底或光束和光学元件）之间的位移的能力对于许多精密实验和工艺是基本的。然而，典型的光学位移传感器难以显著低于衍射极限。在这里，我们结合联合收割机在我们的理解与硅光子波导纳米粒子的定向散射的进展，以证明深亚波长精度的位移传感器。根据集成度和波导几何形状的不同，我们可以实现5 - 7 nm之间的空间分辨率，相当于约λ/200-λ/300。
The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.
高精度绝缘体上硅位置传感器
影响因子：
5.6
作者：
Beck P
通讯作者：
Beck P