Characterization of defect levels in undoped n-BaSi2 epitaxial films on Si(111) by deep-level transient spectroscopy

Characterization of defect levels in undoped n-BaSi2 epitaxial films on Si(111) by deep-level transient spectroscopy
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通过深能级瞬态光谱表征 Si(111) 上未掺杂 n-BaSi2 外延膜的缺陷能级

DOI:
10.7567/jjap.54.07je01
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发表时间:
2014
影响因子:
1.5
通讯作者:
T. Suemasu
T. Suemasu
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
H. Takeuchi;W. Du;M. Baba;R. Takabe;K. Toko;T. Suemasu

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用深能级瞬态谱(DLTS)技术研究了分子束外延生长的650 nm厚未掺杂n-BaSi 2外延层中的电活性缺陷能级。层结构被设计成使得耗尽区在反向偏压条件下朝向n-BaSi 2层延伸。DLTS揭示了多数载流子(电子)陷阱的存在下,位于约0.1和0.2 eV的导带底部以下。这些陷阱能级的密度约为1 × 1015 cm−3。光响应光谱也讨论了这些陷阱的水平。在这项工作中没有检测到少数载流子陷阱。
Electrically active defect levels in 650-nm-thick undoped n-BaSi2 epitaxial layers grown by molecular beam epitaxy were investigated by deep-level transient spectroscopy (DLTS) using undoped n-BaSi2/p-Si heterojunction diodes. The layer structure was designed so that the depletion region extended toward the n-BaSi2 layers under reverse bias conditions. DLTS revealed the presence of majority-carrier (electron) traps located at approximately 0.1 and 0.2 eV below the bottom of the conduction band. The densities of these trap levels were approximately 1 × 1015 cm−3. Photoresponse spectra are also discussed in relation to these trap levels. Minority-carrier traps were not detected in this work.
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