Interfacial structure of Fe3Si/FeSi2 layered films deposited on si(111) at elevated substrate-temperatures
Interfacial structure of Fe3Si/FeSi2 layered films deposited on si(111) at elevated substrate-temperatures
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高温下沉积在 si(111) 上的 Fe3Si/FeSi2 层状薄膜的界面结构
DOI:
10.1142/s0217979209062943
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发表时间:
2009
影响因子:
1.7
通讯作者:
K. Nagayama
中科院分区:
文献类型:
--
作者:
K. Takeda;T. Yoshitake;Yoshiki Sakamoto;D. Hara;M. Itakura;N. Kuwano;K. Nagayama
Influence of substrate-temperature on the interfacial structure of Fe3Si/FeSi2 layered films deposited on a Si(111) substrate were studied. Fe3Si/FeSi2 films with sharp interfaces were grown at room substrate-temperature. At a substrate-temperature of 300 °C, interfaces between the Fe3Si and FeSi2 layers were obviously unsharpened, while the crystallinity of Fe3Si was enhanced. The compositional periodic structure was barely unsharpened and it was nearly the same as that of the films deposited at room substrate-temperature. Epitaxial growth of Fe3Si layers across FeSi2 layers was carried out. This substrate-temperature is the upper limit at which the heterostructure formation takes place. At 400 °C, e-FeSi was formed due to activated interdiffusion, and the structure of Fe3Si changed partially from B2-type to DO3-type.
DOI:
--
发表时间:
2006
期刊:
Applied Physics Letters 88
影响因子:
--
作者:
K.Takarabe et al.
通讯作者:
K.Takarabe et al.
DOI:
--
发表时间:
2005
期刊:
Appl.Phys.Lett. 86
影响因子:
--
作者:
T.Yoshitake;et al.
通讯作者:
et al.