Shadowgraph studies of laser-assisted non-thermal structuring of thin layers on flexible substrates by shock-wave-induced delamination processes
Shadowgraph studies of laser-assisted non-thermal structuring of thin layers on flexible substrates by shock-wave-induced delamination processes
复制标题
通过冲击波诱导分层过程在柔性基板上激光辅助非热结构化薄层的阴影图研究
DOI：
10.1016/j.apsusc.2014.09.114
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发表时间：
2015
影响因子：
6.7
通讯作者：
B. Hopp
中科院分区：
文献类型：
--
作者：
P. Lorenz;T. Smausz;T. Csizmadia;M. Ehrhardt;K. Zimmer;B. Hopp
激光辅助薄膜微结构化，尤其是在电子应用中，而不损坏层或衬底，这对激光微加工技术来说是一个挑战。通过烧蚀聚合物衬底的背面，即所谓的“SWIFD”-冲击波诱导的薄膜分层图案化的激光诱导的薄膜图案化已被证明。本研究的重点是时间序列的过程，表征这种SWIFD过程的机制上的铜铟镓硒（CIGS）的太阳能电池叠层聚酰亚胺。为了这个目的，高速阴影实验中进行的泵探头实验设置使用KrF准分子激光烧蚀的聚酰亚胺基板的背面和测量的冲击波产生在激光烧蚀的聚合物基板以及薄膜分层。通过扫描电子显微镜（SEM）的薄膜结构的形态和尺寸进行了研究。此外，通过能量色散X射线（EDX）光谱分析激光处理后的组成。阴影实验允许依赖于时间的识别和评价的冲击波的形成，基板弯曲，和分层的薄膜依赖于激光参数。这些结果将有助于提高对薄膜图形化的激光诱导分层效应的物理理解。
The laser-assisted microstructuring of thin films especially for electronic applications without damaging the layers or the substrates is a challenge for the laser micromachining techniques. The laser-induced thin-film patterning by ablation of the polymer substrate at the rear side that is called ‘SWIFD’ – shock-wave-induced film delamination patterning has been demonstrated. This study focuses on the temporal sequence of processes that characterize the mechanism of this SWIFD process on a copper indium gallium selenide (CIGS) solar cell stacks on polyimide. For this purpose high-speed shadowgraph experiments were performed in a pump probe experimental set-up using a KrF excimer laser for ablating the rear side of the polyimide substrate and measuring the shock wave generation at laser ablation of the polymer substrate as well as the thin-film delamination. The morphology and size of the thin-film structures were studied by scanning electron microscopy (SEM). Furthermore, the composition after the laser treatment was analyzed by energy dispersive X-ray (EDX) spectroscopy. The shadowgraph experiments allow the time-dependent identification and evaluation of the shock wave formation, substrate bending, and delamination of the thin film in dependence on the laser parameters. These results will contribute to improve the physical understanding of the laser-induced delamination effect for thin-film patterning.
研究使用 KrF 准分子激光进行 LIFT 打印对热敏导电粘合剂的影响
DOI：
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发表时间：
2014
期刊：
影响因子：
--
作者：
S. M. Perinchery;E. Smits;A. Sridhar;P. Albert;J. van den Brand;R. Mandamparambil;I. Yakimets;H. Schoo
通讯作者：
H. Schoo
一种改进的激光诱导压力瞬变测量方法
DOI：
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发表时间：
1997
期刊：
影响因子：
--
作者：
A. Olmes;S. Lohmann;H. Lubatschowski;W. Ertmer
通讯作者：
W. Ertmer
聚酰亚胺载体箔背面激光烧蚀诱导 CIGS 薄膜图案化
DOI：
10.1007/s00339-013-7962-2
发表时间：
2013
期刊：
Applied Physics A
影响因子：
--
作者：
M. Ehrhardt;A. Wehrmann;P. Lorenz;K. Zimmer
通讯作者：
K. Zimmer