Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
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基于混合聚合物布拉格光栅的柔性薄膜弯曲传感器
DOI：
10.1117/12.2303820
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
und R. Hellmann
中科院分区：
文献类型：
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作者：
M. Girschikofsky;M. Rosenberger;M. Förthner;M. Rommel;L. Frey;und R. Hellmann
我们报告了一种光学、高度灵活的薄膜弯曲传感器的制造，该传感器基于刻在 OrmoStamp 混合聚合物片上的扩散通道波导布拉格光栅。无机-有机 Ormocer 薄膜是通过非结构化紫外增强压印光刻技术制备的，可以制造具有所需厚度的片状平板基板。通过这种方法，实现了 120 μm 薄且高度柔性的平面平行基板。对于扩散通道波导布拉格光栅的刻写，应用了快速高效的单写入步骤概念，这使得波导和布拉格光栅在短短几秒钟内同时刻写。相应制造的波导布拉格光栅具有位于电信波长范围内的定义的布拉格反射峰值，非常适合需要可靠检测和跟踪反射布拉格波长的传感应用。通过偏转测量来研究由此实现的装置作为高柔性薄膜弯曲传感器的适用性。在这里，我们发现扩散通道波导布拉格光栅反射布拉格波长即使是很小的偏转也会产生准瞬时且高度可重复的响应，其特征是对传感器位移的线性依赖性为 6.05 × 10-4nm/μm。
We report on the fabrication of an optical, highly-flexible thin film bending sensor which is based on diffused channel waveguide Bragg gratings inscribed into sheets of OrmoStamp hybrid polymers. The inorganic-organic Ormocer thin films are prepared by non-structured UV-enhanced imprint lithography which allows the fabrication of sheet-like slab substrates with a desired thickness. By this approach, 120 μm thin and highly-flexible plane-parallel substrates are achieved. For the inscription of the diffused channel waveguide Bragg gratings, a fast and efficient single writing step concept is applied, which allows the simultaneous inscription of both waveguide and Bragg grating in only a few seconds. The accordingly fabricated waveguide Bragg gratings feature a defined Bragg reflection peak that lies within the telecom wavelength range and is well-suited for sensing applications that require a reliable detection and tracking of the reflected Bragg wavelength. The applicability of the thus achieved devices as highly-flexible thin film bending sensors is investigated by means of deflection measurements. Here, we found a quasi-instantaneous and highly-reproducible response of the diffused channel waveguide Bragg gratings reflected Bragg wavelength to even small deflections which features a linear dependency of 6.05 × 10-4nm/μm on the sensors displacement.
平面布拉格光栅传感器检测一元醇的体积收缩
DOI：
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发表时间：
2014
期刊：
影响因子：
--
作者：
M. Girschikofsky;S. Scheurich;S. Belle;R. Hellmann
通讯作者：
R. Hellmann
UV-NIL 结构 Ormocer 波导中布拉格光栅传感器的制造
DOI：
10.1117/12.2249665
发表时间：
2017
期刊：
影响因子：
--
作者：
M. Girschikofsky;M. Förthner;M. Rommel;L. Frey;und R. Hellmann
通讯作者：
und R. Hellmann