Dielectric breakdown toughness from filament induced dielectric breakdown in borosilicate glass

Dielectric breakdown toughness from filament induced dielectric breakdown in borosilicate glass
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硼硅酸盐玻璃中灯丝引起的介电击穿引起的介电韧击穿

DOI:
10.1016/j.jeurceramsoc.2018.05.036
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发表时间:
2018
影响因子:
5.7
通讯作者:
Schneider
Schneider
中科院分区:
材料科学1区
文献类型:
--
作者:
Fischer;Schneider

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测量了硼硅酸盐玻璃的介电击穿强度与导电丝长度的函数关系,以确定击穿沟道生长的临界能量释放。这一概念类似于断裂力学中韧性的实验测定,并基于具有空间电荷限制电导率的介质材料中的电能释放率的Griffith模型。通过聚焦离子束球磨和铂沉积,在厚度为163μm的硼硅酸盐玻璃衬底上制备了长达100μm的导电沟道。具有长于30μm的灯丝的基板的介电击穿强度可以很好地用施耐德模型预测的1 f i L a m e n t L e n g t h关系来描述。首次确定了介质击穿的临界能量释放率为6.30±0.95mJ/m。
The dielectric breakdown strength of borosilicate glass was measured as a function of the length of a conducting filament in order to determine the critical energy release for the growth of a breakdown channel. The concept is similar to the experimental determination of the toughness in fracture mechanics and based on a Griffith type model for the electrical energy release rate in dielectric materials with space charge limited conductivity. By Focused-Ion-Beam-milling and Pt-deposition, up to 100 μm long conductive channels were fabricated in 163 μm thick borosilicate glass substrates. The dielectric breakdown strength of substrates with filaments longer than 30 μm could be very well described by a 1 f i l a m e n t l e n g t h-dependence predicted by the model Schneider, 2013. With these results for the first time a critical energy release rate for dielectric breakdown was determined being 6.30±0.95 mJ/m.
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