In-situ internal stress observation of ferromagnetic thin films at the initial stage of the film growth during sputter-deposition process

In-situ internal stress observation of ferromagnetic thin films at the initial stage of the film growth during sputter-deposition process
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溅射沉积铁磁薄膜生长初期的内应力原位观察

DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
S. Nakagawa
S. Nakagawa
中科院分区:
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文献类型:
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作者:
H. Hayashibara;M. Nakagome;Y. Takamura;S. Nakagawa

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期刊:
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