In-situ internal stress observation of ferromagnetic thin films at the initial stage of the film growth during sputter-deposition process
In-situ internal stress observation of ferromagnetic thin films at the initial stage of the film growth during sputter-deposition process
复制标题
溅射沉积铁磁薄膜生长初期的内应力原位观察
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
S. Nakagawa
中科院分区:
文献类型:
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作者:
H. Hayashibara;M. Nakagome;Y. Takamura;S. Nakagawa
DOI:
10.1063/1.1145316
发表时间:
1995
期刊:
影响因子:
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作者:
D. Sander;A. Enders;J. Kirschner
通讯作者:
J. Kirschner