Tactile display MEMS device with SU8 micro-pin and spring on SMA film actuator array
Tactile display MEMS device with SU8 micro-pin and spring on SMA film actuator array
复制标题
SMA 薄膜致动器阵列上具有 SU8 微引脚和弹簧的触觉显示 MEMS 器件
DOI：
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
Konomu Abe
中科院分区：
文献类型：
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作者：
T. Mineta;Hiroshi Yanatori;K. Hiyoshi;Kazuki Tsuji;Yasuhiro Ono;Konomu Abe
提出了一种由SMA厚膜驱动器阵列和光刻SU8微机构组成的5×5阵列MEMS平面触觉显示器件（间距为1mm）。SU 8偏置弹簧的设计使触觉显示器在静态运动中与SMA致动器结合时可以产生20 μm的位移和5 mN的力。当采用占空比为50%的脉冲电压驱动时，触觉显示的幅度随着驱动频率的增加而减小。然而，该设备能够产生大于10 μm的振幅，足以在30 Hz和低占空比下对人体皮肤进行振动刺激。
We propose a 5×5 arrayed MEMS planar tactile display device (1 mm pitch) consists of SMA thick film actuator array and photo-lithographed SU8 micro-mechanism of bias spring, micro-pin, and cap array. The SU8 bias spring was designed so that the tactile display can generate 20 μm displacement and 5 mN force when it is combined with the SMA actuator in static motion. The amplitude of the tactile display decreased with increasing driving frequency when it was driven by pulse voltage with 50 % duty ratio. However, the device was able to generate amplitude larger than 10 μm, sufficient for vibratory stimulation to human skin, at 30 Hz with low duty ratio.
影响因子：
2.4
作者：
BOLANOWSKI, SJ;GESCHEIDER, GA;CHECKOSKY, CM
通讯作者：
CHECKOSKY, CM