Gas sensing properties of nanocrystalline diamond at room temperature.

Gas sensing properties of nanocrystalline diamond at room temperature.
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DOI:
10.3762/bjnano.5.243
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发表时间:
2014
影响因子:
3.1
通讯作者:
Kromka A
Kromka A
中科院分区:
材料科学3区
文献类型:
--
作者:
Davydova M;Kulha P;Laposa A;Hruska K;Demo P;Kromka A

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本研究描述了一种基于交叉指电极结构上的氢化纳米晶金刚石(NCD)敏感层的集成NH3传感器。在室温下用还原气体(NH3)测试了传感器结构的气敏性能,发现传感器结构的气敏性能与电极布置有关。该传感器由致密的电极阵列(间隔50微米)组成,具有显著的响应。用表面转移掺杂效应解释了传感器的功能。此外,氢化NCD电流密度分布的三维模型描述了电子在交指电极和氢化NCD表面之间的瞬时流动,即形成一个闭合的电流环。
This study describes an integrated NH3 sensor based on a hydrogenated nanocrystalline diamond (NCD)-sensitive layer coated on an interdigitated electrode structure. The gas sensing properties of the sensor structure were examined using a reducing gas (NH3) at room temperature and were found to be dependent on the electrode arrangement. A pronounced response of the sensor, which was comprised of dense electrode arrays (of 50 µm separation distance), was observed. The sensor functionality was explained by the surface transfer doping effect. Moreover, the three-dimensional model of the current density distribution of the hydrogenated NCD describes the transient flow of electrons between interdigitated electrodes and the hydrogenated NCD surface, that is, the formation of a closed current loop.
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