UV-LIGA microfabrication of 0.3 THz double corrugated waveguide
UV-LIGA microfabrication of 0.3 THz double corrugated waveguide
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0.3 THz 双波纹波导的 UV-LIGA 微加工
DOI：
10.1109/ivec.2017.8289639
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
Sabaawi A
中科院分区：
文献类型：
--
作者：
Sabaawi A
基于紫外光刻（UV LIGA）的两种先进的微加工工艺已经被开发出来，以实现用于亚太赫兹真空电子器件（VED）的相对高纵横比慢波结构（SWS）的制造和快速、低成本的原型制作。一种工艺是基于使用多层SU-8光致抗蚀剂。多层方法确保了电铸接地层或装配表面所需的平面度和表面质量。这也确保了SWS的低欧姆损耗。第二种工艺被开发为金属涂层SU-8工艺，该工艺可以在最终以全金属形状稳健地实现结构之前作为快速且低成本的原型技术。本文报道了0.3THz双波纹波导的制作过程。提出的快速原型和微制造技术的组合方法将使亚太赫兹VED的3D SWS的快速，负担得起的和准确的制造成为可能。
Two advanced microfabrication processes based on ultraviolet photolithography (UV LIGA) to enable both fabrication and rapid, low cost prototyping of relatively high aspect ratio Slow Wave Structures (SWS) for sub-THz vacuum electron devices (VEDs) have been developed. One process is based on the use of a multi-layer SU-8 photoresist. The multi-layer approach ensures the planarity and the surface quality required to electroform the ground plane or for assembly surfaces. This also ensures low ohmic losses of the SWS. The second process is developed as metal-coated SU-8 process which can serve as a fast and low cost prototyping technique prior final robust realization of the structure in a full metal shape. The main steps of the two processes are here reported for the fabrication of the double corrugated waveguide at 0.3 THz. The combined approach of fast prototyping and microfabrication techniques proposed will enable fast, affordable and accurate fabrication of 3D SWSs for sub-THz VEDs.
使用快速原型技术制造 35 GHz 折叠波导 TWT 电路
DOI：
--
发表时间：
2014
期刊：
International Conference on Infrared, Millimeter, and Terahertz Waves
影响因子：
--
作者：
James P. Anderson;R. Ouedraogo;David Gordon
通讯作者：
David Gordon
DOI：
10.1088/0960-1317/26/9/095010
发表时间：
2016-09-01
影响因子：
2.3
作者：
Malekabadi, Ali;Paoloni, Claudio
通讯作者：
Paoloni, Claudio