Fine Pitch Flexible Printed Circuit Board Patterning for Miniaturized Endoscopic MicroUltrasound Arrays
Fine Pitch Flexible Printed Circuit Board Patterning for Miniaturized Endoscopic MicroUltrasound Arrays
复制标题
用于小型化内窥镜微超声阵列的细间距柔性印刷电路板图案化
DOI：
10.1109/tuffc.2022.3189338
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
C. Démoré
中科院分区：
文献类型：
--
作者：
C. Roa;Nidhi Singh;E. Chérin;Jianhua Yin;Aaron Boyes;F. Foster;C. Démoré
微超声(Micro-US)已成为临床前研究以及在临床诊断和治疗指导中的新兴应用的宝贵工具。几种这样的应用可以受益于具有小占地面积和内窥镜形状因数的阵列。然而，在这样的空间限制下与阵列元件进行电连接时出现了关键的挑战。在这项工作中，我们描述了一种方法，利用聚合物抗蚀剂的激光烧蚀和湿法刻蚀，在铜基聚酰亚胺薄膜上形成高密度柔性电路布线，然后演示与微型US阵列的连接。我们研究了激光烧蚀工艺参数，并评估了持续绘制连续铜痕迹图案的能力。使用5-；行-公式；<；行-数学符号=“LaTeX”>；$\mU\Text{m}$<；/行-公式->；/行-公式->最小间距为30-lt；行-公式；<；行-数学符号=“LaTeX”&>；$\MU-Text{m}$<；/-行-数学-公式->-宽的电极线，并证明了5-m-长轨迹的连续性。一种30毫米长的柔性电路，具有30-lt；内联公式；<；TeX-MATH NOTATION=“LaTeX”>；$\MU\Text{m}$<；/Tex-MATH&>线和30-lt；内嵌-公式&>30-lt；内联-公式&>t；Tex-MATH NOTATION=“Laex”>；$\MU\Text{m}$<；/Tex-MASH&>；<；/内联-公式&>t；扇出前的空间被制造成以交错方式连接到具有30-lt；内联公式；<；Tex-Math NOTATION=“LaTeX”>；$\MU\Text{m}$<；/内联-公式&>元素间距的32元素阵列。采用金属沉积和激光烧蚀的方法将元件电极连接到柔性电路的铜线上，并对其进行图形化。电学和声学测量显示出良好的成品率和跨通道一致的阻抗。元件脉冲-回波测试证明了设备的功能；双向脉冲的中心频率为43-MHz，分数带宽为40%(−为6分贝)。所提出的制造方法促进了柔性内窥镜或小占地面积微US设备的原型和制造。
Microultrasound (micro-US) has become an invaluable tool for preclinical research and in emerging applications in clinical diagnosis and treatment guidance. Several such applications can benefit from arrays with a small footprint and endoscopic form factor. However, critical challenges arise in making electrical connections to array elements in such spatial constraints. In this work, we describe a method to pattern a high-density flexible circuit cabling on a copper-on polyimide film, using laser ablation of a polymer resist and wet etching, and then demonstrate a connection to a micro-US array. We investigate laser ablation process parameters and evaluate the ability to consistently pattern continuous copper traces. A minimum 30-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> pitch was achieved with 5-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula>-wide electrode lines, and continuity of a 5-m-long trace is demonstrated. A flexible circuit with 30-mm-long traces with 30-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> line and 30-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> space before fan-out was fabricated to connect in an interleaved manner to a 32-element array with 30-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> element pitch. Metal deposition and laser ablation were used to connect and pattern the element electrodes to the copper traces of the flexible circuit. Electrical and acoustic measurements show good yield and consistent impedance across channels. Element pulse-echo tests demonstrated device functionality; the two-way pulse had 43-MHz center frequency and 40% fractional bandwidth (−6 dB). The proposed manufacturing methods facilitate the prototyping and fabrication of flexible endoscopic or small-footprint micro-US devices.
影响因子：
13.3
作者：
Guo, Liang;DeWeerth, Stephen P.
通讯作者：
DeWeerth, Stephen P.