Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination
Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination
复制标题
通过表面等离子体照明延长近场等离子体透镜的空气工作距离
DOI：
10.1007/s11468-014-9776-2
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发表时间：
2015-02
期刊：
影响因子：
3
通讯作者：
Xiangang Luo
中科院分区：
文献类型：
--
作者：
Wei Zhang;Xiangang Luo
提出并论证了一种延长深亚波长分辨率近场等离子体透镜空气工作距离的方法。它是通过采用具有高横向波矢量的表面等离子体激元照明（SPI）和具有金属-电介质-金属结构的等离子体激元透镜来完成的。采用亚波长光栅和多层金属介质膜的SPI光源，使掩模图形的空间光谱分量发生偏移，从而提高了等离子体透镜在大的空气工作距离下对图形信息的光学传递能力。此外，金属反射器用于调制成像区域中的切向和法向电场分量的大小，并带来成像质量的显著改善。数值模拟结果表明，在365 nm波长下，当半间距分辨率为32 nm时，该超透镜的最大空气工作距离可达60，约为常规超透镜的6倍。给出了SPI条件下气动工作距离延长的近似模型，与仿真结果吻合较好。
A method is proposed and demonstrated to elongate the air working distance of near-field plasmonic lens with deep subwavelength resolution. It is done by employing surface plasmon illumination (SPI) with a high transverse wavevector and a plasmonic lens with a metal-dielectric-metal structure. Specially designed SPI source with subwavelength grating and multiple metal-dielectric films delivers the shifted spatial spectra components of mask patterns, which help to enhance plasmonic lens optical transfer ability of patterns’ information even with a large air working distance. Moreover, a metal reflector serves to modulate the magnitude of the tangential and normal electric field components in the imaging region and brings the considerable improvement of imaging quality. Numerical simulations show that the maximum air working distance could reach 60 for 32 nm half-pitch resolution at 365 nm wavelength about six times that for the conventional superlens under normal illumination (NI). An approximate model of the air working distance elongation under SPI is given and agrees well with simulations.
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影响因子：
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