Fabrication of micro-slot optics on curved substrate by X-ray lithography and electroplating
Fabrication of micro-slot optics on curved substrate by X-ray lithography and electroplating
复制标题
通过 X 射线光刻和电镀在弯曲基板上制造微槽光学器件
DOI：
10.1007/s00542-020-04990-8
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
Shuanglei Zhang
中科院分区：
文献类型：
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作者：
Tianchong Zhang;F. Yi;Bo Wang;Jing Liu;Xiaoxiao Liang;Mingming Yan;Yusa Wang;Zijian Zhao;Shuanglei Zhang
我们开发了微槽光学（MSO），它可以用于反射和聚焦x射线。它是由大量的弯曲MSO板的同心圆与必要的径向支撑结构组成一个球形。平面MSO板可以通过x射线光刻和普通电镀制备；然而，由于金属MSO的微小曲率在其弹性变形范围内，因此随后的塑性变形过程很难实现。本文提出了一种制备球面弯曲MSO板的方法。经过x射线光刻工艺，可以直接在弯曲基板上电镀得到球形MSO板。x射线测试结果显示有一个明显的焦斑，角分辨率约为5角分，表明MSO板的微槽已成功弯曲。
We have developed micro-slot optics (MSO) which can be used in the mirrors to reflect and focus X-rays. It is composed of a large number of concentric rings of curved MSO plates with necessary radial supporting structures to form a spherical shape. Flat MSO plates can be fabricated by X-ray lithography and normal electroplating; however, the subsequent plastically deforming process is very difficult to achieve, since the tiny curvature of the metal MSO is within its elastically deforming range. In this work, a method is developed to fabricate spherically curved MSO plates. After the X-ray lithography process, spherical MSO plates can be obtained directly by electroplating on a curved substrate. X-ray testing results show an obvious focal spot, with an angular resolution of about 5 arcmin, demonstrating that the micro-slots in the MSO plates have been curved successfully.
使用用于空间 X 射线望远镜的 DRIE 和 X 射线 LIGA 技术的超轻、高分辨率 X 射线反射镜
DOI：
--
发表时间：
2010
期刊：
Microsyst. Technol. 16
影响因子：
--
作者：
E.Yuichiro;I.Mitsuishi;U.Takagi;M.Koshiishi;K.Mitsuda;N.Y.Yamasaki;T.Ohashi;F.Kato;S.Sugiyama;R.E.Riveros;H.Yamaguchi;S.Fujihira;Y.Kanamori;K.Morishita;K.Nakajima;R.Maeda
通讯作者：
R.Maeda