Pore size control of ultrathin silicon membranes by rapid thermal carbonization.

Pore size control of ultrathin silicon membranes by rapid thermal carbonization.
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DOI:
10.1021/nl101602z
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发表时间:
2010-10-13
期刊:
影响因子:
10.8
通讯作者:
Fauchet PM
Fauchet PM
中科院分区:
材料科学1区
文献类型:
--
作者:
Fang DZ;Striemer CC;Gaborski TR;McGrath JL;Fauchet PM

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采用稀乙炔(C2H2)气氛下的快速热碳化技术对超薄多孔纳米晶硅(pnc-Si)的孔径进行了化学修饰和精确调节。通过改变工艺温度和时间来控制尺寸减小的幅度。在一定条件下,碳涂层显示出与孔壁共形的石墨烯层的原子有序性。初步实验表明,碳化膜遵循理论预测的水力渗透性,并保留了未处理膜的精确分离能力。
Rapid thermal carbonization in a dilute acetylene (C2H2) atmosphere has been used to chemically modify and precisely tune the pore size of ultrathin porous nanocrystalline silicon (pnc-Si). The magnitude of size reduction was controlled by varying the process temperature and time. Under certain conditions, the carbon coating displayed atomic ordering indicative of graphene layer formation conformal to the pore walls. Initial experiments show that carbonized membranes follow theoretical predictions for hydraulic permeability and retain the precise separation capabilities of untreated membranes.
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