Pore size control of ultrathin silicon membranes by rapid thermal carbonization.
Pore size control of ultrathin silicon membranes by rapid thermal carbonization.
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DOI:
10.1021/nl101602z
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发表时间:
2010-10-13
期刊:
影响因子:
10.8
通讯作者:
Fauchet PM
中科院分区:
文献类型:
--
作者:
Fang DZ;Striemer CC;Gaborski TR;McGrath JL;Fauchet PM
Rapid thermal carbonization in a dilute acetylene (C2H2) atmosphere has been used to chemically modify and precisely tune the pore size of ultrathin porous nanocrystalline silicon (pnc-Si). The magnitude of size reduction was controlled by varying the process temperature and time. Under certain conditions, the carbon coating displayed atomic ordering indicative of graphene layer formation conformal to the pore walls. Initial experiments show that carbonized membranes follow theoretical predictions for hydraulic permeability and retain the precise separation capabilities of untreated membranes.
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