Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance.
Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance.
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DOI：
10.1038/s41598-021-95793-y
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发表时间：
2021-08-12
影响因子：
4.6
通讯作者：
Frangi A
中科院分区：
文献类型：
--
作者：
Gobat G;Zega V;Fedeli P;Guerinoni L;Touzé C;Frangi A
微机电系统以其小尺寸、高性能和低成本的特点彻底改变了消费市场。近年来，物联网的发展给MEMS设计人员带来了新的挑战，他们必须处理经历高度非线性动态响应的复杂多物理场系统。为了能够模拟这种系统的先验和实时行为，因此必须了解非线性的来源，并在有害时避免它们，或者将它们用于创新设备的设计。在这项工作中，我们提出了第一个数值工具，能够估计先验和实时的MEMS器件的复杂的非线性响应，而不诉诸于简化的理论。此外，所提出的工具预测不同的工作条件，而不需要特设的校准程序。它包括基于隐式静态凝聚的非线性模型降阶技术，该技术允许将高保真度的FEM模型凝聚成几个自由度，从而大大加快了求解阶段并改善了MEMS器件的设计过程。特别是，1：2的内部谐振经历的MEMS陀螺仪测试结构制造的商业过程进行了数值研究，并与实验发现一个很好的协议。
Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly nonlinear dynamic responses. To be able to simulate a priori and in real-time the behavior of such systems it is thus becoming mandatory to understand the sources of nonlinearities and avoid them when harmful or exploit them for the design of innovative devices. In this work, we present the first numerical tool able to estimate a priori and in real-time the complex nonlinear responses of MEMS devices without resorting to simplified theories. Moreover, the proposed tool predicts different working conditions without the need of ad-hoc calibration procedures. It consists in a nonlinear Model Order Reduction Technique based on the Implicit Static Condensation that allows to condense the high fidelity FEM models into few degrees of freedom, thus greatly speeding-up the solution phase and improving the design process of MEMS devices. In particular, the 1:2 internal resonance experienced in a MEMS gyroscope test-structure fabricated with a commercial process is numerically investigated and an excellent agreement with experiments is found.
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影响因子：
16.6
作者：
Keşkekler A;Shoshani O;Lee M;van der Zant HSJ;Steeneken PG;Alijani F
通讯作者：
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DOI：
10.1016/j.ijnonlinmec.2019.07.002
发表时间：
2019-11-01
影响因子：
3.2
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影响因子：
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