X-ray standing waves: a method for thin layered systems
X-ray standing waves: a method for thin layered systems
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X 射线驻波：一种薄层系统的方法
DOI：
10.1039/b607252f
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发表时间：
2006
影响因子：
3.4
通讯作者：
R. Hergenröder
中科院分区：
文献类型：
--
作者：
M. Krämer;A. Bohlen;C. Sternemann;M. Paulus;R. Hergenröder
掠入射x射线驻波光谱（GI-XSW）被证明是一种在纳米尺度上表征多层薄膜和元素分布的通用方法。在这项工作中，我们提出了一个测量程序和计算机模拟工具的发展，以解释测量强度。研究了四种不同的样品。首先，在29 nm ~ 1 μm的硅上测定了一组锗薄层的厚度，证明了该方法的宽动态范围是可行的，但也存在一定的局限性。其次，分析了在硅衬底上80 nm聚苯乙烯薄膜上蒸发的金簇样品。低对比度有机单层、双层或多层是XSW表征的第三种样品。最后，介绍了利用XSW和快速傅立叶变换评价方法对激光多层反射镜进行定性和定量表征的方法。本报告概述了每种样品的测量和模拟程序，以及这种XSW方法的可能性和局限性。
X-ray standing wave spectroscopy at grazing incidence (GI-XSW) is demonstrated to be a versatile method to characterize multilayer thin films and element distributions on a nanometre scale. In this work we present a measurement procedure and development of a computerized simulation tool to interpret measured intensities. Four different kinds of samples are investigated. First, thickness determination of a set of thin germanium layers on silicon ranging from 29 nm to 1 μm is presented, which demonstrates the wide dynamic range that is feasible and the limitations that occur. Second, analysis of a sample of gold clusters evaporated on an 80 nm polystyrene film on a silicon substrate is shown. Low contrast organic mono-, double or multilayers is the third kind of sample to be characterized by XSW. Finally, qualitative and quantitative characterization of a laser multilayer mirror utilizing XSW and a fast Fourier transform evaluation method are described. Measurement and simulation procedures for each kind of sample are outlined in this report as well as the possibilities and limits of this XSW method.
使用可变周期 X 射线驻波表征膜结构。
影响因子：
3.4
作者：
Zhang,R;Itri,R;Caffrey,M
通讯作者：
Caffrey,M
使用 X 射线驻波进行膜结构研究。
DOI：
10.1146/annurev.bb.24.060195.002031
发表时间：
1995
期刊：
Annual review of biophysics and biomolecular structure.
影响因子：
--
作者：
Caffrey,M;Wang,J
通讯作者：
Wang,J