Modeling Graphene-Polymer Heterostructure MEMS Membranes with the Föppl-von Kármán Equations.
Modeling Graphene-Polymer Heterostructure MEMS Membranes with the Föppl-von Kármán Equations.
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DOI：
10.1021/acsami.2c21096
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发表时间：
2023-02-07
影响因子：
9.5
通讯作者：
Heil, Matthias
中科院分区：
文献类型：
--
作者：
Smith, Katherine;Retallick, Aidan;Melendrez, Daniel;Vijayaraghavan, Aravind;Heil, Matthias
超薄石墨烯基膜已经显示出用于高性能纳米机电（NEMS）器件的显著前景。在这种膜的建模的关键挑战是，他们经常在偏转制度的假设或近似的“纯弯曲”或“纯拉伸”不满意。我们提出了一个石墨烯-聚合物异质结构（GPH）NEMS膜的基础上Föppl-von卡门（FvK）方程，考虑到弯曲和拉伸力。通过原子力显微镜形貌映射获得的实验GPH膜形状相比，基于FvK的有限元方法模拟预测的膨胀形状，它们显示出良好的协议彼此。当GPH膜在电容式压力传感器配置中在压力下偏转时，该模型的有效性进一步通过准确地预测在变化的压力下偏转GPH膜装置的电容变化来举例说明。该模型在石墨烯基NEMS器件的设计和开发中作为一种强大的新工具，能够预测石墨烯NEMS器件的性能或帮助设计器件几何形状以匹配所需的性能。
Ultra-thin graphene-based membranes have shown significant promise for high-performance nano-electro-mechanical (NEMS) devices. The key challenge in the modeling of such membranes is that they often operate in deflection regimes where the assumptions or approximations of “pure bending” or “pure stretching” are not satisfied. We present a model of graphene–polymer heterostructure (GPH) NEMS membranes based on Föppl–von Kármán (FvK) equations which take into account both bending and stretching forces. The experimental GPH membrane shape obtained through atomic force microscopy topography mapping is compared to the inflation shapes predicted by FvK-based finite element method simulation, and they show excellent agreement with each other. When the GPH membranes are deflected under pressure in a capacitive pressure sensor configuration, the effectiveness of this model is further exemplified through accurately predicting the capacitance change of deflecting GPH membrane devices at varying pressures. This model serves as a powerful new tool in the design and development of graphene-based NEMS devices, being able to predict the performance of graphene NEMS devices or to aid in the design of device geometries to match required performances.
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