Influence of argon pressure on sputter-deposited molybdenum back contacts for flexible Cu(In,Ga)Se2 solar cells on polyimide films

Influence of argon pressure on sputter-deposited molybdenum back contacts for flexible Cu(In,Ga)Se2 solar cells on polyimide films
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氩气压力对聚酰亚胺薄膜上柔性 Cu(In,Ga)Se2 太阳能电池溅射沉积钼背接触的影响

DOI:
10.1016/j.solener.2022.06.006
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发表时间:
2022
期刊:
影响因子:
6.7
通讯作者:
Ishizuka Shogo
Ishizuka Shogo
中科院分区:
工程技术2区
文献类型:
--
作者:
Kamikawa Yukiko;Masuda Taizo;Nishinaga Jiro;Ishizuka Shogo

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本研究采用不同厚度和热膨胀系数的聚酰亚胺薄膜作为Cu(In,Ga)Se2(CIGS)太阳电池轻质柔性衬底的候选材料。研究了沉积过程中Ar背景压力(PAR)对聚酰亚胺薄膜上Mo背接触性能的影响。结果表明,钼接触的应力状态为热应力和本征应力之和。热应力取决于聚酰亚胺薄膜的热膨胀系数(CTE)和诱导压缩应力。本征应力受PAr的影响较大。在聚酰亚胺薄膜上沉积的Mo层中,高PAr值引起了较大的拉伸内应力,并随后形成了裂纹,而在参考硬质玻璃基板上没有观察到明显的裂纹形成。沉积在聚酰亚胺薄膜上的Mo中的裂纹导致方块电阻显著增加,从而恶化了CIGS太阳电池的填充因子。PAR值的降低降低了Mo层的拉伸内应力,防止了有害裂纹的形成,提高了柔性聚酰亚胺衬底上CIGS太阳电池的填充因子。钼的应力状态也影响碱金属通过接触的热扩散。通过改变碱硅酸盐薄层的厚度和/或碱金属沉积后处理条件,可以调节Mo胁迫对碱金属扩散的影响,从而提高转化效率。
In this study, polyimide films with various thicknesses and coefficients of thermal expansion were used as candidates of lightweight and flexible substrates for Cu(In, Ga)Se2(CIGS) solar cells. The influence of the Ar background pressure (PAr) during deposition on the properties of the Mo back contact on the polyimide films was investigated. It was found that the stress condition of the Mo contact was the sum of thermal and intrinsic stresses. The thermal stress depended on the coefficient of thermal expansion (CTE) of polyimide films and induced compressive stresses. The intrinsic stress was largely influenced by thePAr. HighPArcaused large tensile intrinsic stress and the subsequent formation of cracks in the Mo layer deposited on the polyimide films, whereas no apparent formation of cracks was observed on the reference rigid-glass substrates. The crack formation in Mo deposited on the polyimide films subsequently caused remarkable increase in sheet resistance, which deteriorated the fill factor of the CIGS solar cells. The decreasingPArreduced the tensile intrinsic stress in the Mo layer, preventing the detrimental crack formation and improving the fill factor of the CIGS solar cells on the flexible polyimide substrates. The stress condition of the Mo was also found to influence thermal diffusion of alkali metal through the contact. The impact of the Mo stress on alkali metal diffusion was adjustable by varying the thickness of alkali silicate thin layers and/or alkali-metal postdeposition treatment conditions, improving conversion efficiency.
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