Catalyzed chemical polishing of SiO2 glasses in pure water.
Catalyzed chemical polishing of SiO2 glasses in pure water.
复制标题
纯水中 SiO2 玻璃的催化化学抛光。
DOI：
10.1063/1.5090320
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
K. Yamauchi
中科院分区：
文献类型：
--
作者：
D. Toh;P. V. Bui;A. Isohashi;N. Kidani;S. Matsuyama;Y. Sano;Y. Morikawa;K. Yamauchi
开发了催化辅助蚀刻系统，用于光学元件的超精密制造，例如 X 射线镜和极紫外掩模坯料。这项研究表明，分别使用纯水和 Pt 作为蚀刻溶液和催化剂，可以在 SiO2 玻璃基板上实现具有亚埃均方根粗糙度的原子级光滑表面。密度泛函理论计算证实该机制途径参与催化水解。催化剂的重要作用被阐明是水分子的解离和亚稳态的稳定，其中诱导高价硅酸盐状态，并且Si-O背键被拉长和松弛。为了确认催化剂的作用，将 Pt 金属替换为 Au，观察到的去除率的巨大差异归因于亚稳态的稳定程度。
A catalytically assisted etching system was developed for the ultra-precision fabrication of optical components, such as X-ray mirrors and extreme-ultraviolet mask blanks. This study demonstrates that an atomically smooth surface with a sub-Angstrom root-mean-square roughness could be achieved on a SiO2 glass substrate using pure water and Pt as the etching solution and catalyst, respectively. Density functional theory calculations confirmed that the mechanistic pathway was involved in catalyzed hydrolysis. The significant roles of the catalyst were clarified to be the dissociation of water molecules and the stabilization of a meta-stable state, in which a hypervalent silicate state is induced, and the Si-O backbond is elongated and loosened. To confirm the role of the catalyst, the Pt metal was replaced by Au, and the observed drastic difference in the removal rate was attributed to the degree of stabilization of the metastable state.
影响因子：
64.8
作者：
Sugimoto, Yoshiaki;Pou, Pablo;Custance, Oscar
通讯作者：
Custance, Oscar
影响因子：
--
作者：
Okamoto, Takeshi;Sano, Yasuhisa;Yamauchi, Kazuto
通讯作者：
Yamauchi, Kazuto