Measurement of carbon sputtering yield by N+ ion beam and lifetime dependence of resulting foils on thickness
Measurement of carbon sputtering yield by N+ ion beam and lifetime dependence of resulting foils on thickness
复制标题
通过 N 离子束测量碳溅射产率以及所得箔的寿命对厚度的依赖性
DOI：
10.1016/j.nima.2008.02.080
复制
发表时间：
2008
影响因子：
1.4
通讯作者：
K. Kawasaki
中科院分区：
文献类型：
--
作者：
Isao Sugai;M. Oyaizu;Y. Takeda;H. Kawakami;T. Hattori;K. Kawasaki
具有较高氮含量的碳剥离箔是通过用反应性氮气进行离子束溅射而制成的。这种箔作为高强度重离子加速器的剥离器似乎非常有用。为了进一步了解此类碳箔的寿命特征，我们测量了碳源材料在 4–15kV 溅射电压下的溅射产率以及此类箔的寿命对厚度的依赖性。使用 3.2MeV Ne+ 离子束进行寿命测量。在超过 9kV 的溅射电压下，平均溅射产率为 0.75 个原子/离子。箔的寿命明显取决于箔的厚度，实际剥离箔的厚度范围约为 15 至 33μg/cm2。两种在 13kV 下制造的箔片显示出极长的寿命，最高可达 6800 和 6000mC/cm2，而在 10kV 以上制造的箔片的寿命长于约 900mC/cm2，这相当于比市售最佳箔片长约 270 和 40 倍。我们通过RBS方法测量了在不同溅射电压和不同辐照阶段制备的每个箔片中氮与碳的厚度比（mC/cm2）。我们还通过透射电子显微镜检查了氮化碳箔的结构。
Carbon stripper foils with a higher nitrogen content were made by ion beam sputtering with reactive nitrogen gas. Such foils seem to be very useful as strippers for high-intensity heavy ion accelerators. To know further characteristics of the lifetime of such carbon foils, we have measured the sputtering yield of the carbon source material at a sputtering voltage of 4–15kV and the lifetime dependence of such foils on thickness. Lifetime measurement was performed with a 3.2MeV Ne+ion beam. The sputtering yield on average showed 0.75atoms/ion at over 9kV sputtering voltage. The lifetime of the foils noticeably depends on the foil thickness, and the thickness range as practical stripper foil is to be around 15 to 33μg/cm2. Two foils made at 13kV showed extremely long lifetimes of 6800 and 6000mC/cm2at maximum and the foils made above 10kV lived longer than about 900mC/cm2, which correspond to about 270 and 40 times longer than commercially available best foils. We measured the thickness ratio of nitrogen to carbon in each foil made at the different sputtering voltages and at the different irradiation stages (mC/cm2) by RBS method. We also inspected the structure of a nitrided carbon foil by transmission electron microscopy.
J-PARC RCS 厚碳剥离箔的测试准备。
DOI：
--
发表时间：
2004
期刊：
Nuclear Instruments and Method in Physics Research A521
影响因子：
--
作者：
I.Sugai;Y.Takeda;M.Oyaizu
通讯作者：
M.Oyaizu
通过二元气体混合物离子束溅射提高氮化碳剥离箔的使用寿命
DOI：
--
发表时间：
2005
期刊：
Nucl. Instr. and Metho. In Physics Research A 521
影响因子：
--
作者：
I.Sugai;Y.Takeda;et al.
通讯作者：
et al.