Current status of the hard x-ray nanoprobe beamline at the SSRF
Current status of the hard x-ray nanoprobe beamline at the SSRF
复制标题
SSRF 硬 X 射线纳米探针束线的现状
DOI：
10.1117/12.2273518
复制
发表时间：
2017
期刊：
影响因子：
--
通讯作者：
D. Shu
中科院分区：
文献类型：
--
作者：
Aiguo Li;Hui Jiang;Hua Wang;Zhaohong Zhang;Yan He;Gaofeng Zhao;D. Shu
上海同步辐射装置（SSRF）设计的硬X射线纳米探针束线（HXN）将能够实现硬X射线焦点尺寸为10 nm，满足生物、环境、材料科学等领域的要求。束线包括两种工作模式，分别是高能量分辨率模式和高通量模式。高通量模式利用多层 KB 系统获得~10nm 的高通量衍射极限聚焦。为了满足瑞利准则，需要用于衍射极限聚焦的超高精度图形制造。克服这个问题的一个想法是在 KB 系统上游引入相位补偿器来补偿光束线中的波前误差。在波长上，将使用基于散斑的方法来测量光束线中的波前误差并反馈到相位补偿器。振动测量已在辅助源和终端站室进行。柔性铰链机构和高精度执行机构保证了KB系统和样品机械手工作的高稳定性。 HXN大楼已设计完毕，目前正在建设中。
The hard X-ray nanoprobe beamline (HXN) designed at the Shanghai Synchrotron Radiation facility (SSRF) will be of capability to realize a focal spot size of 10 nm for hard X-rays to satisfy requirements in biology, environmental, material sciences and etc.. The beamline includes two modes of operation, high energy resolution mode and high flux mode respectively. High flux mode utilizes the multilayer KB system to obtain high-flux diffraction-limited focusing of ~10nm. An ultra-high-precision figure fabrication for diffraction-limited focusing is required to meet the Rayleigh Criterion. An idea to overcome this problem is to introduce a phase compensator upstream of the KB system to compensate the wavefront errors in the beamline. At wavelength speckle-based method will be used to measure the wavefront error in the beamline and feedback to the phase compensator. Vibration measurements have been carried out at the secondary source and endstation hutch. The flexure hinge mechanisms and high-precision actuators ensure the KB system and sample manipulator working with high stability. The building of HXN has been designed and is under construction at present.
影响因子：
19.6
作者：
Mimura, Hidekazu;Handa, Soichiro;Yamauchi, Kazuto
通讯作者：
Yamauchi, Kazuto