Implications of electron heating and non-uniformities in a VHF-CCP for sterilization of medical instruments
Implications of electron heating and non-uniformities in a VHF-CCP for sterilization of medical instruments
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VHF-CCP 中电子加热和不均匀性对医疗器械灭菌的影响
DOI：
10.1088/0963-0252/24/3/034014
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发表时间：
2015
影响因子：
3.8
通讯作者：
P. Awakowicz
中科院分区：
文献类型：
--
作者：
K. Stapelmann;M. Fiebrandt;T. Styrnoll;S. Baldus;N. Bibinov;P. Awakowicz
本文用发射光谱和多极共振探针研究了VHF波段81.36MHz频率下的电容耦合等离子体。放电是用氢气操作的，产生正电性放电，以及氧气，产生负电性放电，以及两者的混合物。压力从p=5？> P=25？宾夕法尼亚州放电的均匀性进行了研究，CCD摄像机记录，以及空间分辨多极共振探针测量。结果表明，存在电磁边缘效应以及驻波效应。此外，在压力p=5？-10帕随着压力的增加以及随着氧含量的增加，放电显得不那么均匀。从正电性到负电性放电的过渡导致电子加热机制的变化，在鞘层边缘具有明显的局部最大电子密度。OES和MRP结果的比较揭示了电子密度的显着差异，这可以解释由非麦克斯韦分布函数的电子。
A capacitively coupled plasma driven at a frequency of 81.36 MHz from the VHF-band is investigated by means of optical emission spectroscopy (OES) and multipole resonance probe (MRP). The discharge is operated with hydrogen, yielding an electropositive discharge, as well as oxygen, yielding an electronegative discharge, and mixtures of both. Pressure is varied from p=5 ?> Pa to p=25 ?> Pa. Homogeneity of the discharge is investigated by CCD camera recordings as well as spatially resolved multipole resonance probe measurements. The results indicate the presence of electromagnetic edge effects as well as standing wave effects. Furthermore, a largely homogeneous discharge can be achieved with hydrogen as process gas at a pressure of p=5 ?>–10 Pa. With increasing pressure as well as with increasing oxygen content, the discharge appears less homogeneously. The transition from an electropositive to an electronegative discharge leads to a change in electron heating mechanisms, with pronounced local maxima of electron density at the sheath edges. A comparison of OES and MRP results reveal a significant difference in electron density, which can be explained by a non-Maxwellian distribution function of electrons.
利用低压等离子体灭活不锈钢螺丝上的细菌孢子
影响因子：
4.2
作者：
Stapelmann K;Fiebrandt M;Raguse M;Awakowicz;Reitz G;Moeller R
通讯作者：
Moeller R