Optimum cut orientation of piezoelectric substrate and propagation direction of SAW for rotation rate sensor
Optimum cut orientation of piezoelectric substrate and propagation direction of SAW for rotation rate sensor
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转速传感器压电基板的最佳切割方向和声表面波传播方向
DOI：
10.1016/j.measurement.2010.11.004
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发表时间：
2011-02
期刊：
影响因子：
5.6
通讯作者：
Xuan, Jianqing
中科院分区：
文献类型：
--
作者：
Chen, Zhijun;Zhang, Xiaoning;Xuan, Jianqing
The effect of Coriolis and centrifugal forces on the propagation characteristics of surface acoustic waves (SAW) on a rotating piezoelectric substrate can be utilized for sensing rotation rate. In this paper, the relationship between SAW phase velocity and the rotation rate of the substrate is analyzed theoretically and numerically based on the coupling wave equations on anisotropic piezoelectric substrate with rotation effect. Partial wave theory and surface effective permittivity method are employed. Using LiNbO3as an example, some quantitative results of SAW rotation rate sensor, including free and metalized interfaces between substrate and free space in X-cuts, Y-cuts, and Z-cuts, are obtained. Furthermore, by considering comprehensively SAW rotation rate sensitivity with SAW excitation efficiency and beam steering, the optimum cut orientation of piezoelectric substrate and propagation direction of SAW for rotation rate sensor are presented. The research findings can provide theoretical guidance and simulation basis for the experimental research on SAW rotation rate sensor.
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