Measurement of Active Species Density for Synthesis of Amorphous Carbon Nitrides: II. Formation of CN(X2Σ+) by Decomposition of BrCN
Measurement of Active Species Density for Synthesis of Amorphous Carbon Nitrides: II. Formation of CN(X2Σ+) by Decomposition of BrCN
复制标题
用于合成非晶碳氮化物的活性物质密度的测量：II. BrCN 分解形成 CN(X2Σ+)
DOI：
10.1143/jjap.45.5213
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发表时间：
2006
影响因子：
1.5
通讯作者：
Yoshinori Sato
中科院分区：
文献类型：
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作者：
Haruhiko Ito;Yoshinori Sato
CN（X2+）自由基的密度被认为是形成非晶氮化碳膜的前体，通过CN（A2 i-X2+）、4-0、5-1和7-2带的激光诱导荧光（LIF）光谱测量。在0.1Torr的气压下，通过微波（MW）放电流激发BrCN产生CN（X2 ~+）自由基，并在引入BrCN的喷嘴尖端下游观察到LIF光谱。通过光谱模拟分析和Ar原子对瑞利散射强度的校准来评估单个跃迁的LIF强度。CN（X2+）密度估计为9.9×1017 m-3。使用先前测定的Ar+密度[H]分析该密度。Ito等人：JPN. J.Appl.Phys.43（2004）7277]，提出CN（X2 ~+）的主要产生和损失过程分别是BrCN ~+-e-复合和与BrCN的猝灭.
The density of CN(X2Σ+) radicals, which are considered to be the precursor to the formation of amorphous carbon nitride films, was measured by laser-induced fluorescence (LIF) spectroscopy of the CN(A2Πi–X2Σ+), 4-0, 5-1, and 7-2 bands. The CN(X2Σ+) radicals were produced by the dissociative excitation reaction of BrCN with microwave (MW) discharge flow of Ar under the pressure of 0.1 Torr, and the LIF spectra were observed just downstream of the nozzle tip from which BrCN was introduced. The LIF intensity for the individual transition was evaluated by spectral simulation analysis and by calibration against the Rayleigh scattering intensity by Ar atoms. The CN(X2Σ+) density was evaluated to be 9.9×1017 m-3. This density was analyzed using the previously determined Ar+ density [H. Ito et al.: Jpn. J. Appl. Phys. 43 (2004) 7277], and it is suggested that the dominant production and loss processes of CN(X2Σ+) are BrCN+-e- recombination and quenching with BrCN, respectively.
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DOI：
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发表时间：
2002
期刊：
Japanese Journal of Applied Physics 41
影响因子：
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作者：
Y.Ohkawara;S.Ohshio;T.Suzuki;K.Yatsui;H.Ito;H.Saitoh
通讯作者：
H.Saitoh
微波氩气放电流中合成非晶碳氮化物 I 亚稳原子和电子活性物质密度的测量
DOI：
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发表时间：
2004
期刊：
Japanese Journal of Applied Physics 43
影响因子：
--
作者：
H.Ito;Y.Sato;H.Saitoh
通讯作者：
H.Saitoh
M. Sato 等人：“基于基本驻波的准相位匹配，从 GaP(111) 基板上的 GaP/AIP 多层产生二次谐波”Jpn。
DOI：
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发表时间：
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期刊：
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DOI：
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发表时间：
2002
期刊：
Japanese Journal of Applied Physics 41
影响因子：
--
作者：
H.Ito;A.Sato;H.Saitoh
通讯作者：
H.Saitoh