Effect of rapid thermal annealing on the properties of zinc tin oxide films prepared by plasma-enhanced atomic layer deposition
Effect of rapid thermal annealing on the properties of zinc tin oxide films prepared by plasma-enhanced atomic layer deposition
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快速热退火对等离子体增强原子层沉积氧化锌锡薄膜性能的影响
DOI：
10.1016/j.ceramint.2020.02.073
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发表时间：
2020-06
影响因子：
5.2
通讯作者：
David Wei Zhang
中科院分区：
文献类型：
--
作者：
Xing-Tao Xue;Yang Gu;Hong-Ping Ma;Cheng-Zhou Hang;Jia-Jia Tao;Hong-Liang Lu;David Wei Zhang
研究了快速退火处理对等离子体增强原子层沉积法制备的锌锡氧化物（ZTO）薄膜的微观结构、表面形貌和光学特性的影响。ZTO膜在氧气气氛中在500至800 °C的四个选定温度下退火2分钟。X射线衍射分析表明，退火温度对ZTO薄膜的结晶特性有很大的影响。沉积态ZTO薄膜具有完全的非晶结构。同时，在500 ~ 800 °C的温度范围内退火，得到了尖晶石型锡酸锌Zn 2SnO 4，显示出多晶的性质。X射线光电子能谱分析表明，氧气气氛下的退火处理可以有效地减少薄膜中的氧空位缺陷。此外，光致发光光谱表现出一个宽的峰值范围从345至385 nm的紫外发射。随着退火温度的升高，薄膜的紫外发光强度不断增强。椭圆偏振光谱分析表明，在可见光范围内，退火后薄膜的折射率随退火温度的升高而增大，消光系数随退火温度的升高而逐渐减小。
The effect of rapid thermal annealing treatments on the microstructure, surface morphology, and optical characteristics of zinc tin oxide (ZTO) films produced by plasma-enhanced atomic layer deposition was investigated. The ZTO films were annealed in oxygen atmosphere for 2 min at four selected temperatures from 500 to 800 °C. The X-ray diffraction showed that the annealing temperature has a great influence on the crystalline characteristics of ZTO films. The film shows complete amorphous structure for as-deposited ZTO film. Meanwhile, the spinel zinc stannate Zn2SnO4was obtained for the samples annealed from 500 to 800 °C, which shows polycrystalline nature. The X-ray photoelectron spectroscopy proved that the annealing process in oxygen gas can effectively can reduce the oxygen vacancy defects in the films. In addition, the photoluminescence spectroscopy manifests an ultraviolet emission with a broad peak range from 345 to 385 nm. Moreover, the ultraviolet luminescence intensity increases continuously with the increase of annealing temperature. Spectroscopic ellipsometry analyses demonstrate that the refractive index of annealed films increases as the increase of annealing temperature, while the extinction coefficient decreases gradually with the increase of annealing temperature in the visible light range.
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影响因子：
6.4
作者：
Soyeon Cho;Jong-Heon Yang;Jong Gyu Oh;S. Cho;Chi-Sun Hwang;Jaeyoung Jang;Sooji Nam
通讯作者：
Soyeon Cho;Jong-Heon Yang;Jong Gyu Oh;S. Cho;Chi-Sun Hwang;Jaeyoung Jang;Sooji Nam
影响因子：
4
作者：
Shalu Sharma;Manoj Kumar;S. Chhoker
通讯作者：
Shalu Sharma;Manoj Kumar;S. Chhoker
DOI：
10.1002/pssa.201600470
发表时间：
2017-02
期刊：
physica status solidi (a)
影响因子：
--
作者：
K. Niang;Junhee Cho;A. Sadhanala;W. Milne;R. Friend;A. Flewitt
通讯作者：
K. Niang;Junhee Cho;A. Sadhanala;W. Milne;R. Friend;A. Flewitt
DOI：
10.1016/j.jphotochem.2004.05.014
发表时间：
2004-11
影响因子：
4.3
作者：
Cun Wang;Xinming Wang;Bo-Qing Xu;Jincai Zhao;B. Mai;P. Peng;G. Sheng;Jia-mo Fu
通讯作者：
Cun Wang;Xinming Wang;Bo-Qing Xu;Jincai Zhao;B. Mai;P. Peng;G. Sheng;Jia-mo Fu
影响因子：
4
作者：
Du Ahn, Byung;Choi, Dong-won;Park, Jin-Seong
通讯作者：
Park, Jin-Seong