A long wavelength infrared narrow-band reflection filter based on an asymmetric hexagonal structure
A long wavelength infrared narrow-band reflection filter based on an asymmetric hexagonal structure
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一种基于非对称六边形结构的长波长红外窄带反射滤光片
DOI：
10.1016/j.optcom.2020.126264
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发表时间：
2020-11
影响因子：
2.4
通讯作者：
Yu Haihong
中科院分区：
文献类型：
--
作者：
Zhang Yuhao;Liang Zhongzhu;Meng Dejia;Shi Xiaoyan;Qin Zheng;Yang Fuming;Zhang Lichao;Qin Yuxin;Lv Jinguang;Wang Xiaoyi;Xu Xingyu;Yu Haihong
在微米尺度上设计了不对称六边形结构，以制造长波长红外波段的窄带反射滤光片。通过将六边形结构旋转20度，可以同时实现7. 99 μm处的单次窄带谐振，反射率高达92%，Q值达到200。光谱分辨率为40 nm，平均反射率超过90%。通过缩放因子 k 改变晶胞的尺寸，它可以过滤 8-12 μm (25 THz–37.5 THz)。所提出的滤波器的移相时间为 1.7 ps。我们还研究了所提出的滤波器的滤波特性，具有显着的品质因数和插入损耗。平均品质因数可达300，插入损耗微不足道，仅为0.4 dB。亚波长滤波器结构由BaF 2 制成的介电基板的周期性阵列和具有低固有损耗的Ge制成的六边形结构组成，与具有多层膜的传统滤波器相比，其需要的层数很少。此外，所提出的结构与入射光的角度无关。此外，它对微加工过程中的舍入问题具有良好的容忍度。当尖锐的顶点变圆时，光谱的中心波长的位置几乎没有移动。该结构可应用于生物传感器和高光谱成像系统。
An asymmetric hexagon structure is designed on the micrometer scale to fabricate a narrow-band reflection filter in the long wavelength infrared band. By rotating the hexagon structure 20 degrees, a single narrow-band resonance can be achieved at 7. 99 μ m with high reflectivity of 92% and Q value of 200 simultaneously. The spectral resolution is 40 nm, and the average reflectivity exceeds 90%. By changing the size of the unit cell through a scaling factor k, it can filter across 8-12 μ m (25 THz–37.5 THz). The dephasing time of the proposed filter is 1.7 ps. We also studied the filtering properties of the proposed filter with significant figure of merit and insertion losses. The average figure of merit can reach 300, and the insignificant insertion loss is only 0.4 dB. The subwavelength filter structure consists of a periodic array of dielectric substrates made of BaF 2 and hexagon structure made of Ge with low intrinsic loss, which requires very few layers compared to traditional filters with multilayer films. In addition, the proposed structure is independent to the angles of the incident light. Moreover, it possesses a good tolerance of rounding issue in micro-fabrication process. The position of the center wavelength of the spectra has hardly shift when the sharp vertices become round. The structure can be applied in biosensor and hyperspectral imaging systems.
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