Design and characterization of a resonant triaxial microprobe
Design and characterization of a resonant triaxial microprobe
复制标题
谐振三轴微探针的设计和表征
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
M. Hoffmann
中科院分区：
文献类型：
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作者：
B. Goj;L. Dressler;M. Hoffmann
触觉微探针的新趋势导致振荡微探针，以克服由高赫兹应力和干扰表面力引起的缺点。测量表面上的薄水膜导致所谓的粘附效应，该粘附效应导致测量故障，例如骤回和错误触发。这导致测量误差和低测量速度。我们提出了一种创新的振荡三轴微探针，安全地避免在所有笛卡尔测量方向的坚持。在这项工作中的系统设计以及表征的微探针。耦合元件数量少、可批量生产的设计和低接触力是微探针的主要特点。
A new trend for tactile microprobes leads to oscillating microprobes in order to overcome the drawbacks resulting from high Hertzian stress and disturbing surface forces. Thin water films on the measurement surface result in the so-called sticking effect which causes measurement faults such as snap-back and false triggering. This leads to measurement errors and low measurement speeds. We present an innovative oscillating triaxial microprobe which safely avoids sticking in all Cartesian measurement directions. The system design as well as the characterization of the microprobe are presented in this work. The low number of coupling elements, the batch-capable design and the low contact forces are the key features of the microprobe.
影响因子：
2.4
作者：
Ferreira, N.;Krah, T.;Haertig, F.
通讯作者：
Haertig, F.