Bimorph‐driven x–y–z translation stage for scanned image microscopy
Bimorph‐driven x–y–z translation stage for scanned image microscopy
复制标题
用于扫描图像显微镜的双压电晶片驱动的 x-y-z 平移台
DOI：
10.1063/1.1139270
复制
发表时间：
1987
影响因子：
1.6
通讯作者：
G. Briggs
中科院分区：
文献类型：
--
作者：
J. Matey;R. Crandall;B. Brycki;G. Briggs
我们开发了一种用于机械扫描显微镜的x-y-z扫描工作台。该工作台由“双S”模压电双晶片构成。样机的偏转灵敏度为0.3μm/V，在三个轴上的行程为±60μm，最低机械共振频率分别为190、220和360 Hz，分别对应于工作台的x、y和z轴。当安装在隔离台上时，舞台的噪声电平为∼0.1nm.级的性能可以用简单的集总元件模型来理解，该模型可用于针对特定应用来优化这种级。
We have developed an x–y–z scanning stage for mechanically scanned microscopy. The stage is constructed of ‘‘double‐S’’ mode piezoelectric bimorphs. The prototype unit has a deflection sensitivity of 0.3 μm/V and a travel in each of the three axes of ±60 μm. The lowest mechanical resonances of the stage are at 190, 220, and 360 Hz, corresponding to the x, y, and z axes of the stage, respectively. The noise level of the stage, when mounted on an isolation table, is ∼0.1 nm. The performance of the stage can be understood in terms of a simple lumped element model which can be used to optimize such stages for particular applications.
DOI：
10.1147/rd.305.0443
发表时间：
1986-09
期刊：
IBM J. Res. Dev.
影响因子：
--
作者：
P. Muralt;D. Pohl;W. Denk
通讯作者：
P. Muralt;D. Pohl;W. Denk