Effect of specimen size on Young's modulus and fracture strength of polysilicon
Effect of specimen size on Young's modulus and fracture strength of polysilicon
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试样尺寸对多晶硅杨氏模量和断裂强度的影响
DOI：
10.1109/84.946774
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
Z. Xie
中科院分区：
文献类型：
--
作者：
W. Sharpe;K. Jackson;K. Hemker;Z. Xie
检查了不同尺寸的多晶硅样品的微观结构，并进行了拉伸试验，以确定测量的模量和强度是否取决于样品的尺寸。所有样本均来自 MCNC 25 次运行的同一 MUMP，厚度为 1.5、2.0 和 3.5 /spl mu/m。对宽度窄至 2 /spl mu/m 和宽达 20 /spl mu/m 的样品进行微观结构检查。测试的拉伸样本宽度为 6、20 或 600 /spl mu/m，长度为 250、1000 或 4000 /spl mu/m。透射电子显微镜 (TEM) 观察中没有任何迹象表明样品尺寸对微观结构有任何影响；柱状晶细小（0.2-0.5/spl mu/m），分布均匀。发现所有样本的宽度与指定的掩模值不同，并且对于较小的样本测量到更明显的变化。使用三种不同的方法来测量杨氏模量，它们都给出 158/spl plusmn/10 GPa 的值，没有证据表明样本尺寸有实质性影响。然而，随着测试部分总表面积的减小（从 1.21 GPa/spl plusmn/0.08 GPa 到 1.65/spl plusmn/0.28 GPa），强度确实有所增加，这反映了较大样本具有更多表面缺陷的事实。简要介绍了测试技术和程序以及对结果的详细分析。
The microstructure of polysilicon specimens of varying size was examined and tensile tests were conducted to determine if the measured modulus and strength depend on the size of the specimen. All specimens were from the same MUMP's 25 run at MCNC, and the thicknesses were 1.5, 2.0, and 3.5 /spl mu/m. Microstructure was examined in specimens as narrow as 2 /spl mu/m and ranging up to 20 /spl mu/m in width. The tensile specimens tested were 6, 20, or 600 /spl mu/m wide and 250, 1000, or 4000 /spl mu/m long. Nothing in the transmission electron microscopy (TEM) observations indicates any effect of specimen size on the microstructure; the columnar grains are fine (0.2-0.5 /spl mu/m) and uniformly distributed. The widths of all specimens were found to differ from the specified mask values, and a more pronounced variation was measured for the smaller specimens. Three different approaches are used to measure Young's modulus, and they all give a value of 158/spl plusmn/10 GPa with no evidence of substantial effects of specimen size. However, the strength does increase somewhat as the total surface area of the test section decreases-from 1.21 GPa/spl plusmn/0.08 GPa to 1.65/spl plusmn/0.28 GPa-reflecting the fact that the larger specimens have more surface flaws. Test techniques and procedures are briefly presented along with detailed analyses of the results.
影响因子：
2.4
作者：
Taechung Yi;C. Kim
通讯作者：
Taechung Yi;C. Kim