Single-use MEMS sealing valve with integrated actuation for ultra low-leak vacuum applications
Single-use MEMS sealing valve with integrated actuation for ultra low-leak vacuum applications
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具有集成驱动功能的一次性 MEMS 密封阀，适用于超低泄漏真空应用
DOI：
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
C. Livermore
中科院分区：
文献类型：
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作者：
A. Dighe;C. Livermore
的设计，建模，制造和成功演示的批量微机械MEMS阀，使高气体流量的数百sccm在其初始打开状态和超低泄漏，永久密封对气流一旦关闭。当阀门打开时，一个高纵横比的焊料环围绕着它的流孔，而不会阻塞流路。当阀门被集成的电阻加热器热驱动时，焊料熔化并回流，在流孔上形成不可逆的密封。流孔形成在硅“岛”中，该硅“岛”被支撑在绝热膜上，以限制到周围硅的热传导，并最小化关闭阀所需的输入功率。阀门的测量开启流量高达约400 sccm。当约0.3W的功率输入到电阻加热器时，观察到流动孔口密封。在测量不确定度范围内，阀门测试期间测得的泄漏率与通过实心板测量流量时测得的泄漏率相当，表明阀门的泄漏小于测试系统的寄生泄漏和放气。当在阀门上施加1个大气压差时，阀门泄漏率和系统寄生泄漏率之间的差值的最小值、平均值和最大值分别为0 sccm、0.65 × 10-4 sccm和1.65 × 10-4 sccm。平均值对应于大于6 × 106的开闭流量比。这种紧凑的密封阀可以与低真空和高真空微型泵组合，以使MEMS真空系统具有初始粗抽真空和长期高真空维持能力。
The design, modeling, fabrication and successful demonstration of a bulk-micromachined MEMS valve that enables high gas flow rates of hundreds of sccm in its initial open state and ultra low-leak, permanent sealing against gas flow once closed are demonstrated. When the valve is open, a high aspect ratio ring of solder surrounds its flow orifice without blocking the flow path. When the valve is thermally actuated by an integrated resistive heater, the solder melts and reflows, creating an irreversible seal over the flow orifice. The flow orifice is formed in a silicon ‘island’ that is supported on a thermally-insulating membrane to limit heat conduction to the surrounding silicon and to minimize the input power that is needed to close the valve. The valve’s measured open flow rate is up to approximately 400 sccm. The flow orifice is observed to seal when about 0.3 W of power are input to the resistive heater. To within the measurement uncertainty, the measured leak rate during valve testing is comparable to the measured leak rate when flow is measured through a solid plate, indicating that the valve’s leakage is less than the test system’s parasitic leakage and outgassing. The minimum, average, and maximum values of difference between the valve leak rate and the system’s parasitic leak rate are 0 sccm, 0.65 × 10–4 sccm, and 1.65 × 10–4 sccm respectively when a 1 atmosphere pressure difference is applied across the valve. The average value corresponds to an open-to-closed flow rate ratio of greater than 6 × 106. This compact sealing valve may be combined with low and high vacuum micropumps to enable MEMS vacuum systems with both initial rough evacuation and long-term high vacuum maintenance capabilities.
影响因子：
7.4
作者：
Pal, R;Yang, M;Burns, MA
通讯作者：
Burns, MA