Periodic nano trench structure fabricated by high-speed scanning CW laser

Periodic nano trench structure fabricated by high-speed scanning CW laser
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高速扫描连续激光制备周期性纳米沟槽结构

DOI:
10.1117/12.905970
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发表时间:
2012
期刊:
--
影响因子:
--
通讯作者:
M. Yoshimoto
M. Yoshimoto
中科院分区:
--
文献类型:
--
作者:
S. Kaneko;T. Ito;M. Yasui;C. Kato;Satomi Tanaka;T. Ozawa;Y. Hirabayashi;A. Matsuno;T. Nire;M. Yoshimoto

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报道了扫描连续波(CW)激光辐照固体材料的周期性纳米结构。长周期的纳米带状光栅线(nano- sgl)不是在一个点上形成的,而是沿着光束扫描的痕迹形成的,在条带线之间有一个凹槽,几乎彼此平行。纳米结构的周期随激光功率在500 ~ 800 nm之间变化,800 nm等于绿色和红外激光扫描的波长。热模拟和拉曼光谱表明,靶材的温度超过了熔化温度,在靶材上形成了周期性的纳米结构。
We report periodic nanostructure on solid material irradiated by scanning continuous wave (CW) laser. Long periodic nano strip grating lines (nano-SGL) formed, not in a spot, but along the trace of the beam scan, literally parallel to each other with a at trough between the strip lines. The period of nanostructure was varied with the laser power between 500 nm and 800 nm, which equals to wavelengths used for laser scanning of green and infrared lasers. Thermal simulation and Raman spectra indicated the temperature of target exceeded the melting temperature to form the periodic nanostructure on target materials.
DOI: 10.1007/s00339-002-1979-2
发表时间: 2003-04-01
影响因子: 2.7
作者:
Yasumaru, N;Miyazaki, K;Kiuchi, J
通讯作者: Kiuchi, J