Study on nano-graphitic carbon coating on Si mold insert for precision glass molding
Study on nano-graphitic carbon coating on Si mold insert for precision glass molding
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精密玻璃模压硅模具嵌件纳米石墨碳涂层的研究
DOI：
10.1016/j.surfcoat.2022.128893
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发表时间：
2022
影响因子：
5.4
通讯作者：
Jiwang Yan
中科院分区：
文献类型：
--
作者：
Lin Zhang;Jiwang Yan
精密玻璃成型技术是一种高效、有发展前景的大批量微光学加工技术。尽管精密玻璃成型在防粘涂层方面取得了重大进展，但在裁剪涂层以确保多次成型周期中的耐用性和长期加工一致性方面，仍然存在技术挑战和障碍。本文介绍了一种新的成型技术，在高精度玻璃成型中，使用涂有新开发的纳米石墨化碳涂层的微图案化硅模具刀片作为隔离层。采用常压化学气相沉积(APCVD)技术，分别以液体苯和硅橡胶为碳源和碳化硅(SiOC)源制备涂层。对不同条件下制备的纳米石墨炭涂层的纳米形貌进行了表征和分析，结果表明，随着硅橡胶的加入和生长时间的不同，纳米石墨炭涂层的表面特征有显著差异。在演示中，纳米石墨化碳涂层硅模插件显示出独特的性能，包括防粘结和高温疏水。利用紫外光刻和金刚石车削产生的两种微图案化硅模具镶件，即微柱矩阵和微透镜阵列，论证了防粘涂层在精密玻璃成型中的可行性。结果表明，涂层硅模插件上的微光学特征成功地转移到了高复制保真度的玻璃基板上，在重复成型周期中没有明显的粘接或污染迹象。这项新兴技术使硅成为一种表面附着力低的替代模具材料，提高了微光学加工效率，并大规模复制了以前无法获得的高精度、低成本的微光学。
Precision glass molding is an efficient and promising technique for large-volume micro-optical manufacturing. Even though significant progress in precision glass molding has been achieved on the anti-adhesive coating, technical challenges and barriers still exist towards tailoring the coating layer to ensure durability and long-term processing consistency in numerous molding cycles. This manuscript presents a novel molding technique utilizing micro-patterned Si mold inserts coated with a newly developed nano-graphitic carbon coating as an isolation layer in high-precision glass molding. The coating is prepared by atmospheric pressure chemical vapor deposition (APCVD), in which the liquid benzene and silicone rubber are used as the carbon source and silicon oxycarbide (SiOC) source, respectively. The nano-morphologies of the nano-graphitic carbon coating with different conditions are characterized and analyzed, illustrating notable differences in surface features with the addition of silicone rubber and various growth durations. In the demonstration, the nano-graphitic carbon-coated Si mold inserts exhibit unique properties, including anti-adhesive and hydrophobic at elevated temperatures. Two kinds of micro-patterned Si mold inserts, a micro-pillar matrix and a micro-lens array, generated by UV lithography and diamond turning, are utilized to demonstrate the feasibility of the anti-adhesive coating in precision glass molding. The obtained results indicate that the micro-optical features on the coated Si mold inserts are successfully transferred to glass substrates with high replication fidelity without notable signs of adhesion or contamination in repetitive molding cycles. This emerging technology makes Si an alternative mold material with low surface adhesion, enhances micro-optical machining efficiency, and replicates high-precision, low-cost micro-optics on large scales that were previously unavailable.
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