Two-axis water-immersible microscanning mirror for scanning optics and acoustic microscopy
Two-axis water-immersible microscanning mirror for scanning optics and acoustic microscopy
复制标题
用于扫描光学和声学显微镜的两轴水浸式微扫描镜
DOI：
10.1117/1.jmm.15.4.045005
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
J. Zou
中科院分区：
文献类型：
--
作者：
Song Xu;J. Zou
抽象。快速多轴扫描不仅适用于光学显微成像，而且适用于声学显微成像。虽然它们已被用于光学扫描，但（MEMS）扫描镜在声学显微镜中的应用仍然非常有限，这是由于它们的小镜板尺寸，更重要的是，无法在液体中操作（作为超声耦合介质）。报道了一种用于光学和声学显微镜的微加工双轴水浸扫描镜。它有一个光学和声学反射镜板（6 mm×4 mm），为超声波束转向提供数值孔径。通过电磁和力学分析和仿真，估算了快轴和慢轴的机械倾角和谐振频率，与测量结果吻合较好。快轴的共振频率在空气中为320 Hz，在水中为220 Hz，比慢轴的共振频率（空气中为24 Hz，水中为14 Hz）高10倍以上。在100 mA的驱动电流下，快轴在空气和水中的扫描角分别达到±9.5 °。在共振频率下，慢轴扫描角在空气中可达±15 °，在水中可达±12.5 °。光栅扫描的准直激光束是通过驱动两个轴同时接近自己的共振频率。论证了双轴水浸式扫描镜在扫描声显微镜中应用的可行性。
Abstract. Fast multiaxis scanning is useful for not only optical but also acoustic microscopic imaging. Although they have been used for optical scanning, the application of (MEMS) scanning mirrors in acoustic microscopy is still very limited due to their small mirror plate size, and more importantly, inability to operate in liquids (as ultrasound coupling media). A microfabricated two-axis water-immersible scanning mirror for optical and acoustic microscopy is reported. It has an optical and acoustically reflective mirror plate (6 mm×4 mm) to provide numerical aperture for ultrasound beam steering. Electromagnetic and mechanical analysis and simulation were conducted to estimate the mechanical tilting angle and resonance frequency of both fast and slow axes, which matches well with the measurement results. The fast axis has a resonant frequency of 320 Hz in air and 220 Hz in water, which is more than 10 times higher than that of the slow axis (24 Hz in air and 14 Hz in water). Under a 100-mA driving current, the scanning angles of the fast axis reached ±9.5 deg in both air and water at the resonance frequency, respectively. The scanning angles of the slow axis reached ±15 deg in air and ±12.5 deg in water at resonant frequencies, respectively. Raster scanning of a collimated laser beam was achieved by driving both axes simultaneously close to their own resonance frequencies. The feasibility of using the two-axis water-immersible scanning mirror in scanning acoustic microscopy was also demonstrated.
影响因子：
3.5
作者：
Yao, Junjie;Maslov, Konstantin I.;Wang, Lihong V.
通讯作者：
Wang, Lihong V.