Optical characterization of Al- and N-polar AlN waveguides for integrated optics

Optical characterization of Al- and N-polar AlN waveguides for integrated optics
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用于集成光学器件的 Al 和 N 极性 AlN 波导的光学特性

DOI:
10.7567/apex.8.042603
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发表时间:
2015
影响因子:
2.3
通讯作者:
M. Zgonik
M. Zgonik
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
M. Rigler;Jože Buh;M. Hoffmann;R. Kirste;M. Bobea;S. Mita;M. Gerhold;R. Collazo;Z. Sitar;M. Zgonik

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采用多角度入射和椭圆偏振光谱技术测量了Al和N极性AlN波导的非寻常折射率和寻常折射率的色散。在(0001)-蓝宝石衬底上通过金属有机化学气相沉积生长极性控制的AlN层。考虑到Al和N极性AlN波导的不同表面形貌,我们提出了两个光学模型来描述测量的椭圆偏振数据。结果表明,在相反的方向上生长的AlN的折射率之间没有差异,这证实了AlN侧极性结构用于基于准相位匹配的非线性光学应用的潜力。
Dispersion of the extraordinary and ordinary refractive indices of Al- and N-polar AlN waveguides is measured by multiple angle-of-incidence and spectroscopic ellipsometry techniques. The polarity-controlled AlN layers are grown by metal–organic chemical vapor deposition on (0001)-sapphire substrates. Taking into consideration the different surface morphologies of the Al- and N-polar AlN waveguides, we propose two optical models to describe the measured ellipsometry data. The results indicate that there is no difference between the refractive indices of the AlN grown in opposite directions, which confirms the potential of the AlN lateral polar structures for use in nonlinear optical applications based on quasi phase matching.
DOI: 10.1002/pssc.201300287
发表时间: 2014
期刊: Physica Status Solidi (c)
影响因子: --
作者:
R. Kirste;S. Mita;M.P. Hoffmann;L. Hussey;W. Guo;I. Bryan;Z. Bryan;J. Tweedie;M. Gerhold;A. Hoffmann;R. Collazo;Z. Sitar
通讯作者: Z. Sitar