Influence of TiN-nanolayered insertions on microstructure and mechanical properties of TiSiN nanocomposite film
Influence of TiN-nanolayered insertions on microstructure and mechanical properties of TiSiN nanocomposite film
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TiN纳米层插入对TiSiN纳米复合薄膜微观结构和力学性能的影响
DOI：
10.1007/s10853-014-8107-5
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发表时间：
2014-02
影响因子：
4.5
通讯作者：
He, Daihua
中科院分区：
文献类型：
--
作者：
Li, Wei;Liu, Ping;Zhu, Xiaodong;Zhang, Ke;Ma, Fengcang;Liu, Xinkuan;Chen, Xiaohong;He, Daihua
采用磁控溅射技术将不同厚度的TiN纳米层嵌入TiSiN纳米复合薄膜中。利用X射线衍射、高分辨率透射电子显微镜、扫描电子显微镜和纳米压痕技术研究了不同厚度的TiN插入纳米层对TiSiN薄膜微观结构和力学性能的影响。当TiN插入层厚度<0.5 nm时，TiN纳米层可以协调相邻TiSiN层中TiN纳米晶之间的错误取向，导致SiNx界面相包裹TiN纳米晶的纳米复合结构转变为柱状晶体结构，纳米复合结构的强化作用消失。当 TiN 插入层厚度增加到 1.0 nm 时，TiSiN 和 TiN 层之间的外延生长结构增强了薄膜的强度。随着TiN插入层进一步加厚，硬度和弹性模量明显下降，这可归因于TiSiN和TiN层之间外延生长结构的破坏。
TiN nanolayers with different thicknesses were inserted in TiSiN nanocomposite film by magnetron-sputtering technique. The influences of TiN insertion nanolayers with different thicknesses on microstructure and mechanical properties of TiSiN film were investigated X-ray diffraction, high-resolution transmission electron microscopy, scanning electron microscopy, and nanoindentation techniques. When the TiN insertion layer thickness is <0.5 nm, TiN nanolayers can coordinate the misorientations between TiN nanocrystallites in adjacent TiSiN layers, leading to the transformation from the nanocomposite structure with TiN nanocrystallites encapsulated by SiNxinterfacial phase into columnar crystal structure, and disappearance of the strengthening effect from the nanocomposite structure. When the TiN insertion layer thickness increases to 1.0 nm, the film is strengthened with the epitaxial growth structures between TiSiN and TiN layers. As the TiN insertion layers further thicken, the hardness and elastic modulus evidently decrease, which can be attributed to the breakage of epitaxial growth structures between TiSiN and TiN layers.
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影响因子：
5.4
作者：
S. Vepřek;A. Niederhofer;K. Moto;T. Bolom;H.-D. Männling;P. Nesládek;G. Dollinger;A. Bergmaier
通讯作者：
S. Vepřek;A. Niederhofer;K. Moto;T. Bolom;H.-D. Männling;P. Nesládek;G. Dollinger;A. Bergmaier
影响因子：
4
作者：
S. Vepřek;S. G. Prilliman;S. Clark
通讯作者：
S. Vepřek;S. G. Prilliman;S. Clark
影响因子：
5.4
作者：
Veprek, S;Argon, AS
通讯作者：
Argon, AS
影响因子：
3.6
作者：
LI, SZ;SHI, YL;PENG, HR
通讯作者：
PENG, HR
影响因子：
3.7
作者：
Alexandra Jung;I. Bonn;V. Ksenofontov;M. Panthöfer;S. Reiman;C. Felser;W. Tremel
通讯作者：
Alexandra Jung;I. Bonn;V. Ksenofontov;M. Panthöfer;S. Reiman;C. Felser;W. Tremel