Construction of high-performance magnetic sensor based on anisotropic magnetoresistance Ta/MgO/NiFe/MgO/Ta film
Construction of high-performance magnetic sensor based on anisotropic magnetoresistance Ta/MgO/NiFe/MgO/Ta film
复制标题
基于各向异性磁阻Ta/MgO/NiFe/MgO/Ta薄膜的高性能磁传感器的构建
DOI：
10.1007/s12598-021-01719-y
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发表时间：
2021-03
期刊：
影响因子：
8.8
通讯作者：
Yu Guanghua
中科院分区：
文献类型：
--
作者：
Pan Yuedou;Yu Lingran;Wang Lei;Chen Tao;Wei Xinya;Zhu Ronggui;Li Jianwei;Feng Chun;Yu Guanghua
The anisotropic magnetoresistance film is an important core material for developing the magnetic sensors.Here,Ta(5)/MgO(3)/NiFe(10)/MgO(3)/Ta(3) multilayers (in nanometer) were prepared by magnetron sputtering and further applied to construct a sensor element by combining with the Wheatstone bridge.The 1/f noise of the sensor element was greatly reduced by three orders of magnitude after annealing at 400 ℃ for 7200 s,which was mainly due to the significant microstructural changes during the annealing.However,when the sensor element was applied to detect the magnetic signal of a magnetic code disk with 512 N–S magnetic poles,the output voltage signal of the sensor displayed a large fluctuation of ± 0.05 V.In order to reduce the voltage fluctuation,a magnetic sensor chip by using a parallelly arranged multipath Wheatstone bridges and auto-gain compensation structure was designed,and magnetic sensor elements and the high-performance computing drive module were prepared.The output voltage fluctuation of the magnetic sensor was reduced by about 90% and approached to ± 0.005 V.These findings provide an important basis for the practical application of NiFe-based magnetic sensing film materials.
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影响因子：
2.3
作者：
H. Reichlová;H. Reichlová;V. Novák;Y. Kurosaki;M. Yamada;Hiroyuki Yamamoto;A. Nishide;Jun Hayakawa;H. Takahashi;Miroslav Maryško;J. Wunderlich;J. Wunderlich;X. Marti;T. Jungwirth;T. Jungwirth
通讯作者：
H. Reichlová;H. Reichlová;V. Novák;Y. Kurosaki;M. Yamada;Hiroyuki Yamamoto;A. Nishide;Jun Hayakawa;H. Takahashi;Miroslav Maryško;J. Wunderlich;J. Wunderlich;X. Marti;T. Jungwirth;T. Jungwirth
DOI：
10.1080/03610926.2015.1107585
发表时间：
2017-06
期刊：
Communications in Statistics - Theory and Methods
影响因子：
--
作者：
Wen-Jang Huang;Nan-Cheng Su
通讯作者：
Wen-Jang Huang;Nan-Cheng Su
影响因子：
10.9
作者：
R. Öksüzoğlu;U. Saraç;M. Yıldırım;H. Çınar
通讯作者：
R. Öksüzoğlu;U. Saraç;M. Yıldırım;H. Çınar
通过控制 Pt/NiFe/IrMn/MgO/Pt 多层膜的界面结构大幅提高阻断温度
影响因子：
1.6
作者：
X. Chen;S. G. Wang;G. Han;S. L. Jiang;K. Yang;Q. Q. Liu;J. L. Liu;R. M. Wang;G. H. Yu
通讯作者：
G. H. Yu
影响因子：
8.8
作者：
Chong-Jun Zhao;L. Ding;J. Huangfu;Jingyan Zhang;Guang-Hua Yu
通讯作者：
Chong-Jun Zhao;L. Ding;J. Huangfu;Jingyan Zhang;Guang-Hua Yu