Preparation and properties of MoS2/a-C films for space tribology

Preparation and properties of MoS2/a-C films for space tribology
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空间摩擦学MoS2/a-C薄膜的制备及性能

DOI:
10.1088/0022-3727/46/42/425301
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发表时间:
2013-10
期刊:
Journal of Physics D: Applied Physics
影响因子:
--
通讯作者:
Huidi Zhou
Huidi Zhou
中科院分区:
其他
文献类型:
--
作者:
Li Ji;Yinping Ye;Jianmin Chen;Huidi Zhou

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采用中频非平衡磁控溅射法制备了不同(Mo+S)/C比的MoS 2/a-C复合薄膜。研究了MoS 2掺杂对薄膜微观结构、力学性能和真空摩擦学性能的影响。结果表明,随着(Mo+S)/C比从0增加到0.19,薄膜中sp2碳含量增加,当(Mo +S)/C比增加到0.07时,薄膜中形成了MoS 2纳米晶。因此,复合膜表现出降低的硬度(从5.2至2.5 GPa)和弹性模量(从116至24 GPa)。随着(Mo+S)/C比从0增加到0.19,薄膜的摩擦系数从0.18降低到0.008,真空滑动时间从3 s增加到3600 s以上。这主要是由于(Mo+S)/C比高(至少为0.12)的薄膜更倾向于在相对面上形成具有低剪切强度的层状MoS 2。此外,在各种测试环境(空气、N2、真空)下研究了(Mo+S)/C比为0.12的复合膜。平均摩擦系数低于0.035,对试验环境的敏感性很小。然而,最高和最低的磨损率(约4 × 10−7 mm 3 Nm−1和0.8 × 10−7 mm 3 Nm−1)分别在真空和氮气中获得。摩擦学行为的环境依赖性与MoS_2晶体的晶格取向和薄膜的石墨化程度有关。
MoS2/a-C composite films with various (Mo+S)/C ratios were deposited by medium frequency unbalanced magnetron sputtering. The effects of MoS2 doping on the microstructure, mechanical and vacuum tribological properties of the films were investigated. Results show that the sp2 carbon content in the film increases with increasing (Mo+S)/C ratio from 0 to 0.19, and MoS2 nanocrystallines are formed in film as (Mo+S)/C ratio increased to 0.07. Consequently, the composite film exhibits decreasing hardness (from 5.2 to 2.5 GPa) and elastic modulus (from 116 to 24 GPa). As the (Mo+S)/C ratio increases from 0 to 0.19, the friction coefficient of the films decreases from 0.18 to 0.008 and sliding time increases from 3 s to more than 3600 s in vacuum. This is mainly attributed to that the films with higher (Mo+S)/C ratios (at least 0.12) are inclined to form the lamellar MoS2 with low shear strength on the counterface. Furthermore, the composite film with (Mo+S)/C ratio of 0.12 has been investigated in various test environments (air, N2, vacuum). The average friction coefficient is lower than 0.035 and it exhibits little sensitivity to the test environment. However, the highest and lowest wear rate (about 4 × 10−7 mm3 Nm−1 and 0.8 × 10−7 mm3 Nm−1) are obtained in vacuum and N2, respectively. The environment dependence of the tribological behaviours is related with the lattice orientation of MoS2 crystalline and the graphitization degree of the film.
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影响因子: 5.4
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