Defect-free hexagonal patterns formed by AB diblock copolymers under triangular confinement

Defect-free hexagonal patterns formed by AB diblock copolymers under triangular confinement
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AB二嵌段共聚物在三角形约束下形成的无缺陷六边形图案

DOI:
10.1016/j.polymer.2019.01.032
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发表时间:
2019-03
期刊:
影响因子:
4.6
通讯作者:
Li Weihua
Li Weihua
中科院分区:
化学2区
文献类型:
--
作者:
Xia Yueming;Li Weihua

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在六方约束下形成六方柱的二嵌段共聚物熔体的自组装为无缺陷的六方图案的制造提供了有用的方法。然而,这种方法的有效性取决于六边形尺寸对畴间距的可替代性。在这里,我们转向另一个横向限制,其形状适合于六边形晶格,即正三角形。首先,我们尝试用自洽场理论(SCFT)来验证完美的六边形图案是在任何大小的三角形中唯一的热力学稳定形态。然后,我们使用SCFT迭代过程来模拟受限熔体的退火动力学。我们发现,少量的缺陷通常形成在一个大的三角形,即使与域间距相称的大小。最后,我们提出了一个多步退火过程,其中完美的六边形图案产生通过异质形核过程。重要的是,完美的六边形图案的实现并没有表现出与三角形的尺寸不可分割性问题,因此可能成为一个有前途的纳米光刻方案。
The self-assembly of a hexagonal cylinder-forming diblock copolymer melt under the hexagonal confinement provides a useful method for the fabrication of defect-free hexagonal patterns. However, the validity of this method depends on the commensurability of the hexagonal size to the domain spacing. Here we turn to another lateral confinement whose shape adapts to the hexagonal lattice, i.e. the regular triangle. First, we attempted to verify that the perfect hexagonal patterns are exclusively the thermodynamic stable morphologies in the triangles with whatever sizes using the self-consistent field theory (SCFT). Then, we simulate the annealing kinetics of the confined melt using the SCFT iteration process. We find that a small number of defects are usually formed in a large triangle even with a commensurate size to the domain spacing. Finally, we propose a multi-step annealing process, where the perfect hexagonal patterns are yielded via a heterogenous nucleation process. Importantly, the achievement of the perfect hexagonal patterns does not exhibit a size-incommensurability issue with the triangles, and thus could become a promising nanolithography scheme.
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