Superconducting boron doped nanocrystalline diamond microwave coplanar resonator

Superconducting boron doped nanocrystalline diamond microwave coplanar resonator
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超导掺硼纳米晶金刚石微波共面谐振器

DOI:
10.1016/j.carbon.2022.08.084
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发表时间:
2023
期刊:
影响因子:
10.9
通讯作者:
Cuenca J
Cuenca J
中科院分区:
材料科学2区
文献类型:
--
作者:
Cuenca J

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提出了一种共面波导谐振器(CPR),用于在微波频率为0.4 ~ 1.2GHz、温度低于3 K的情况下测量超导掺硼纳米金刚石(B-NCD)的动态电感(LK)和穿透深度(λ L)。利用有限元模型和实验测量,本工作表明,薄颗粒状B-NCD膜(厚度d <$500 nm)在Si上具有大的穿透深度(λ L <$3.8 μm),因此具有高的单位面积动力学电感(Lk,□ <$670 ~ 690 pH/□)。这些值比通常在单晶金刚石上获得的膜的值大得多,这可能是由于纳米晶体膜的高粒度。基于测量的结构的Q因子,计算的表面电阻被发现在0.4至1.2 GHz范围内在T< 2 K时约为1.1至6 μΩ,表明颗粒B-NCD用于高品质因数超导微波谐振器和高灵敏度动力学电感探测器的潜力。
A coplanar waveguide resonator (CPR) is presented for kinetic inductance (L k) and penetration depth (λ L) measurements of superconducting boron doped nanocrystalline diamond (B-NCD) at microwave frequencies of 0.4 to 1.2 GHz and at temperatures below 3 K. Using finite element modelling and experimental measurements, this work demonstrates that thin granular B-NCD films (thickness d≈ 500 nm) on Si have a large penetration depth (λ L≈ 3.8 μm), and therefore an associated high kinetic inductance per square (L k,□≈ 670 to 690 pH/□). These values are much larger than those typically obtained for films on single crystal diamond, which is likely due to the high granularity of the nanocrystalline films. Based on the measured Q factors of the structure, the calculated surface resistance is found to be around≈ 1 to 6 μΩ at T< 2 K in the 0.4 to 1.2 GHz range, demonstrating the potential for granular B-NCD for high quality factor superconducting microwave resonators and highly sensitive kinetic inductance detectors.
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